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RTP rapid annealing furnace CY-O1000-120I-T-RTP

RTP rapid annealing furnace CY-O1000-120I-T-RTP

    RTP rapid annealing furnace is a powerful heating equipment independently developed by our company. The RTP rapid annealing furnace is heated by imported infrared heating tube. The shape is novel and the structure is reasonable. The furnace body and the furnace tube can slide freely, which can realize rapid temperature rise and fall.

The tube size of the RTP rapid annealing furnace is 120mm, which can directly place 4 inches of material. The reaction zone of the sample is in a closed quartz chamber, which greatly reduces the possibility of indirect contamination of the sample while completing the production process. The device is equipped with LCD high-definition touch screen, and the setting data experiment operation is all graphic interface. It is convenient and quick to operate, which can greatly improve your experiment efficiency. The equipment has reserved the quick interface for vacuum and air gases, and our vacuum system can be used together with the gas mixing system.

RTP rapid annealing furnace application range:

Rapid annealing furnace equipment can be used for rapid thermal annealing, rapid thermal oxidation, rapid thermal nitridation, silicidation, diffusion, compound semiconductor annealing, post-ion implantation annealing, electrode alloying, crystallization and densification, alloy melting point analysis, thin film deposition, and the like.

RTP rapid annealing furnace technical parameters:

Model

CY-O1000-120I-T-RTP

Furnace tube material

High purity quartz

Furnace tube diameter

120mm

Furnace tube length

500mm

Furnace chamber length

440mm

Heating zone length

400mm

Constant temperature zone

200mm

Operating temperature

0~500℃

Heating rate

Recommended 80℃/ s, fast heating rate 200℃/s

Cooling speed

More than 200℃≤25 min

Temperature control accuracy

±1℃

Temperature control mode

30 or 50 segment program temperature control

Display mode

LCD touch screen

Sealing method

304 stainless steel vacuum flange

Flange interface

1/4" ferrule connector (Ø8 pagoda-shape connector)

Vacuum

4.4E-3Pa

Power supply

AC:220V 50/60Hz

Disclaimer: The product introduction content (including product images, product descriptions, technical parameters, etc.) of this site is for reference only. As the update may not be timely, there will be some differences between the content and the actual situation. Please contact our sales staff to confirm. The information provided on this site does not constitute any offer or promise, and the company will improve and modify any information on the website from time to time without prior notice.

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  • E-mail: cysi@cysi.wang
  • Tel: +86 371 5519 9322
  • Fax: +86 371 8603 6875
  • Add: No. 820, 8th Floor, 1st Unit, 9th Block, Cuizhu Street, High-Tech Zone, Zhengzhou, Henan, China




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