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RF power supply product introduce

The RF power supply uses the stable and reliable power amplifier and the company's core DC control system, so that the product has very stable performance and high product reliability. And provide a variety of models and series, each model and series has different power levels and output frequencies. Chinese and English display interface, easy to operate.

RF power supply

Product Planning

Product series: fixed frequency power supply, wideband power supply, hand / automatic matcher

Frequency planning: 2MHz, 4MHz, 13.56MHz, 27.12MHz, 40.68MHz, 60MHz;

Power planning: 0.75kW to 5kW;

Cooling method: air cooling within 1kW, water cooling above 1kW

System chart

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APFC: Incoming line Power Factor Correction

AC / DC: Power amplifier power supply, adjust the output voltage to change the output power

Main control board: signal processing, function control and RF amplifier control

Amplifier: Switching type amplifier, including signal source (crystal generated), drive and amplification

Combiner: Combiner of output power signals

Matching filtering: main reactance transformation, output 50 ohms

Coupler: forward and reverse power detection

Features of RF power supply:

1. AC 220V and 380V input voltage optional;

2. The incoming line has an APFC module to improve the input side power factor;

3. The frequency conversion series has the function of automatic load matching, which can work and switch under fixed frequency and frequency conversion;

4. With advanced software algorithms, such as: heuristic intelligent frequency tracking, intelligent power limit algorithm, etc .;

5. Using NXP power amplifier chip, high precision 16-bit synchronous ADC;

6. Full digital control, high stability and rich operation menu;

7. RS232, EtherCAT, EtherNET communication interface;

13.56MHz Main Specifications

Input indicators

1

AC input voltage

220VAC±10% or 380V±5%

2

AC input frequency

50Hz/60Hz

3

Ground leakage current

4mA

4

Power factor

0.98,  full power output, standard load: 50Ω

5

Efficiency

75%, Z = 50Ω, FWD = rated power


Output indicators

1

Output frequency

13.56MHz

2

Frequency stability

±0.005% (25)

3

Load impedance

50Ω-j0

4

Output power adjustment

FWD forward power

5

Maximum output power

5000W (Load:50Ω)

6

Output power range

1~100%30W~5000W

7

Reverse power limit

MAX: 15% rated power (settable by software)

8

Output dynamic response

Less than 200mS

9

Output power accuracy

FWD300W, < ± 3W

FWD300W, < ± 1% of setting power

Load: 50Ω

10

Output power repeatability

±1%, greater than 5% of set power

11

Output power stability

<±1% Load50Ω

12

Output power leakage

1W, RF-ON, set power = 0W

0.5W, RF-OFF

13

Pulse frequency

100Hz~10KHz

14

Pulse duty cycle

10%  ~ 90%, 1% step length

15

harmonic

-45dBFWD300W

16

Stray

-55dBFWD300W


Control and display

1

remote   control

Analog / digital interface (D-sub 25 pin female)

RS232 communication (D-sub 9-pin male)

2

Set   minimum power step length

Communication or digital setting: 1W; analog setting:3W

3

display

Set power

0~5000W

Forward   power

5000.0W

Reverse   power

800W

frequency

0.0000MHz

Power   status

1.Stop 2.Standby 3.Run

Fault   alarm

Memory failure, overheating, DC overcurrent, internal lockout, fan failure, reverse power overrun, external lockout, overrun overrun, tuning overrun

4

Ramp (type optional)

Time:   0.1 ~ 3000.0S

Slope:   0.1 ~ 1000.0W / S

Close


Physical parameter

1

Size


2

RF output interface

N-type or 7/16

3

AC input interface

MS-3102A-22-22P (4-pin aerial plug male)

4

User Control Interface

D-Sub 25 pin female

5

Communication Interface

D-Sub 9 pin male

6

Cooling water connection

PT 3/8 (female)

7

Grounding stake

M5


Use environment

1

Ambient temperature

5 ~ 40

2

environment humidity

15 ~ 85%

3

Cooling water temperature

20 ~ 30

4

Cooling water pressure

0.3 ~ 0.5MPa

5

Cooling water quality

Pure water or deionized water

RF Matcher Block Diagram

RF Matcher Block Diagram

RF matcher description

RF input and RF output: The RF power source inputs power into the matcher network, and the power is adjusted by the matcher and then connected to the load.

Load capacitance and tuning capacitance: The matching network structure adopts L-type topology, and the load capacitor and tuning capacitor are variable capacitors.

AC input: matching network control power supply.

Phase / amplitude detection: The RF power is connected to the matching network through the RF generator on the phase / amplitude sensor module. The phase / amplitude module provides phase and amplitude signals to the motor control section, thereby controlling the rotation of the load capacitor and tuning capacitor.

Motor control: The phase and amplitude signals are used to generate the driving signals required by the motor for adjustment. Manual control and automatic control can be set. Adjust the position value and limit value of the capacitance through the voltage provided by the potentiometer. After the motor reaches the mechanical limit value, it needs to rotate in the reverse direction.

DC bias: The DC bias voltage is provided by the PCB board and the motor drive control board. The DC bias board provides voltage divider. motor drive board rectifies dc offset voltage, so that the make the interface DC bias voltage always positive.

Matcher main technical indicators

Input indicators

1

AC input voltage

220V ± 10%

2

AC input frequency

50Hz / 60Hz

3

AC  input current

0.5 ~ 1A

4

RF input interface

N-type RF coaxial connector

5

RF input impedance

50Ω


Output indicators

1

Output frequency

13.56MHz

2

Output Interface

Copper bar or 7/16 connector

3

RF maximum output voltage

4000Vpp

4

Load matching range

R (5 ~ 200) + j (+ 200 ~ -200) Ω

5

Maximum output power

5000W (Load: 50Ω)

6

Reflected power

5W or 1% of forward power

7

Tuning time

End-to-end <5S, preset point to match point <0.5-3S

8

Standing wave

Standing wave after matching <1.2

9

Adjustment method

Manual / automatic free switching


Use environment

1

Ambient temperature

5 ~ 45℃

2

environment   humidity

15 ~ 85%

3

Cooling water temperature

20 ~ 30 ° C

4

Cooling water pressure

0.3 ~ 0.5MPa

5

Cooling water quality

Pure water or deionized water


Contact Us
  • E-mail: cysi@cysi.wang
  • Tel: +86 371 5519 9322
  • Fax: +86 371 8603 6875
  • Add: No. 820, 8th Floor, 1st Unit, 9th Block, Cuizhu Street, High-Tech Zone, Zhengzhou, Henan, China




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