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Magnesium Fluoride (MgF2) Sputtering Targets

Magnesium Fluoride (MgF2) Sputtering Targets

    Magnesium Fluoride (MgF2) Sputtering Targets


Magnesium fluoride is an inorganic chemical compound with a chemical formula of MgF2. It is white or crystalline in appearance with a melting point of 1,261°C, a density of 3.18 g/cc, and a vapor pressure of 10-4 Torr at 1,000°C. The main application of magnesium fluoride is in optics, due to its distinctive transparency over a wide range of wavelengths. It is evaporated under vacuum to form anti-reflective layers.

Magnesium Fluoride (MgF2) Specifications:

Material Type

Magnesium   Fluoride

Symbol

MgF2

Color/Appearance

White,   Crystalline Solid

Melting Point (°C)

1,261

Theoretical Density   (g/cc)

2.9–3.2

Z Ratio

0.637

Sputter

RF

Max Power Density

(Watts/Square Inch)

20*

Type of Bond

Indium,   Elastomer

Comments

Substrate   temp and rate control important. Reacts with W. Mo OK.


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