Plasma cleaning machine divided into two types, atmospheric and vacuum; it is widely used in semi-conductor, PCB, medical diagnosis, elastomer industry, optical industry,etc.
RF generator has 40KHz, 13.56Mhz, and 2.45GHz. According to the usage, can choose the suitable RF Power. Our standard chamber capacity has 2L, 5L,10L which used in laboratory. Basing on different industry, we can do customized chamber dimension with requested RF power.
Model No. | CY-P2L |
Product Name | 2L Plasma Cleaner |
Display | LCD touch controller |
Working voltage | AC 220V, 50Hz |
RF Frequency | 40KHz (13.56MHz for optional) |
Coupled mode | condenser coupling, without pollute sample |
RF power | 200 w |
RF offset | < 0.2KHz |
Characteristic impedance | 50Ω, automatic matching |
Vacuum degree | 10-100Pa, equipped with a mechanical pump If request high vacuum, please select our turbo pump system (Optional) |
Gas speed | Two way Float Flow Gas Control10-100ml/min, adjustable |
Control | PLC Touch Panel Program controlAuto/Manual two mode for optional |
Inner chamber size | Stainless Steel Chamber with Φ 100*270mm If Chamber is not enough for using, we have Φ 150*270mm (capacity: 5L)200* 200*260mm (capacity: 10L)for optional |
Pressure Gauge | A simple digital pressure gauge is equipped for reading If request high precision vacuum reading, please select digital vacuum gauge: (Optional) |
Cooling way | Forced cooling |
Outer dimension | 440*390*200mm |
Gross weight | 35 kg |
Time of delivery | 10 working days after receive the payment |
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