Compact UV-Ozone Cleaner is a compact Ultraviolet (UV) Ozone cleaner, which is used for cleaning all types crystal substrates to achieve better thin film quality at low cost. Also, it is an excellent tool to remove and strip photoresist, improve surface wettability, Clean SEM & TEM samples, UV polymer activation, assembly etc.
Compact UV-Ozone Cleaner proven to be highly effective for non-acidic, dry, non-destructive atomic cleaning and removal of organic contaminants using intense 185 nm and 254 nm UV light. Under air and room temperature, the 185 line produces Ozone and while the 254 line excites organic molecules on the surface. This combination drives the rapid destruction and decimation of organic contaminants.
Input Power | AC 110V or AC 208~240V( you can choose as you needed) |
UV Lamp |
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Chamber & Sample Stage |
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Compliance | CE certified |
Warranty | One-year limited warranty with lifetime support ( no warranty for Pyrex glass chamber ) |
ENVIRONMENTAL REQUIREMENT |
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Application |
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