Plasma cleaner is a new high-tech technology that uses plasma to achieve effects that cannot be achieved by conventional cleaning methods. Plasma is a state of matter, also called the fourth state of matter, and it is not the common three states of solid, liquid and gas. Apply enough energy to the gas to ionize and become a plasma state. The "active" components of plasma include: ions, electrons, atoms, active groups, excited nuclides (metastable states), photons, etc. The plasma cleaner uses the properties of these active components to treat the surface of the sample, so as to achieve the purpose of cleaning, coating, etc.
5L Plasma Cleaner Features:
The chamber has a large usable area, uniform glowing, and can clean 6-inch silicon wafers.
5L Plasma Cleaner Technical Parameters:
Main parts | Item | Parameters |
Cleaning chamber | Chamber material | SS304 |
Chamber size | 200x160x240mm |
Coupling method | Capacitive coupling |
RF power supply | Power supply features | The power supply is an all-solid-state RF power supply, and adopts a high-stability and high-reliability power amplifier module and a DC module, which effectively ensures the RF power output of the power supply. High quality electronic components are used to ensure the reliability of the products. |
Power advantages | Long time normal operation Simple and flexible operation High power supply efficiency and low heat generation With perfect reflection power protection function |
RF power | 0~300W continuously adjustable |
Signal frequency | 13.56MHz ±0.005% |
Reflected power | ≤100W |
Power stability | ±0.1% |
RF connector | N type connector |
Machine efficiency | ≥75% |
Harmonic component | ≤-50 dBc |
Cooling method | Forced air cooling |
Gas measurement | Measuring unit | Two-channel mass flow meter Ar 0~200sccm; O2 0~200sccm, customizable Other parameters refer to previous products |
Vacuum | Vacuum measurement | Digital vacuum gauge (resistance gauge) |
Vacuum pump | Two-stage rotary vane vacuum pump |
Motor speed | 50 Hz: 1440; 60 Hz: 1720 |
Pumping rate | 50 Hz: 240L/Min; 60 Hz: 288L/Min |
Vacuum range | 0.1Pa～10000Pa |
Ultimate vacuum | 0.5Pa |
Motor noise | ≤56dB |
Pipe interface | Gas inlet: KF16; exhaust port KF16. |
Connecting pipe | KF16 vacuum bellows |
Vacuum valve | KF16 ball valve |
Motor Power | 400W |
Others | Power supply | AC220V 50/60Hz |
Total power | 800W |
Operating temperature | -10℃--40℃ |
Working vacuum | ≤40Pa |
Overall size | 600mm×650mm×560mm |
Total Weight | 80kg (including packaging) |
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