Basic principle and application of multi-functional coating machine

The multi-functional coating machine is a device that integrates three functions of evaporation coating, vacuum carbon evaporation and plasma sputtering coating to meet different experimental needs of customers. Not only can the metal film be coated by plasma sputtering, but also a film of carbon or other metal element can be obtained by evaporation.

Evaporation coating: Vacuum evaporation is to heat and evaporate the coating material in a vacuum to precipitate vaporized atoms or atomic groups on a substrate with a lower temperature to form a thin film.

In principle, vacuum carbon evaporation is also a vacuum evaporation coating, which requires a high vacuum environment and is mainly used for coating a conductive film on a SEM (Scanning Electron Microscope) sample.

Plasma sputtering coating belongs to DC dipole sputtering. Since plasma sputtering is performed under low pressure, the film has high purity and strong adhesion. Further, since it is low-energy sputtering, a thin film can be deposited on an organic substance having a low melting point.

The basic operation process of the multi-functional coating machine: placce samples, install devices, wiring, timing, vacuuming, adjust current, start timing, and coating completion. Due to the different coating methods of the multi-function coating machine, users need to operate different wiring when using different functions.

The multi-functional coating machine can perform vacuum carbon evaporation, vacuum coating and plasma sputtering. It can also perform a variety of ion treatment under the protection of high purity argon. The sample treated by this equipment can be used for both the appearance observation of the sample and the component analysis, especially the quantitative analysis of the components.