MFC Gas Mass Flow Meter

CY Mass gas flow controller (flow meter) (abbreviated as MFC (MFM)) is a device that accurately measures and controls the mass flow of gas.

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CY Mass gas flow controller (flow meter) (abbreviated as MFC (MFM)) is a device that accurately measures and controls the mass flow of gas.

Mass gas flow meter Features:

1. Mass flow controllers (flow meters) are usually calibrated with nitrogen (N2) before leaving the factory.

2. The unit of mass flow is specified as: standard state mL/min (milliliters per minute) (SCCM industry standard)

3. Standard state L/min (liters per minute) (SLM industry standard)

4. Standard state is specified as: temperature --- 0℃

5. Air pressure — 101325 Pa

6. F.S (Full Scale): indicates full scale value

Flow specifications	(5,10,30,50,100,200,300,500)mL/min (1,2,3,5,10) L/min
Regulating valve type	Solenoid control valve
Regulating valve rest position	Normally Closed
Accuracy	± 2.0% F.S
Linear	±1.0 % F.S，±2.0 % F.S
Repeatability	±0.2 %F.S
Response time	≤8 s（T95）
Working pressure difference range	(50 ～ 300) kPa； (10～30)L/min (100～300)kPa
Pressure resistance	3 MPa ﹑ 10 MPa
Operating temperature	5℃ ～ 45℃
Materials	Stainless steel
Standard sealing materials	Viton?, EPDM, or others
Leak rate	1×10-8 Pa.m3/s
Connectors	Ф3mm～Ф10mm, 1/4″Swagelok (or VCR), Hose connector Ф4mm～Ф10mm or other
Input and output signals	0 V ～ + 5.00 V (Input impedance is greater than 100K, output current is less than 3mA)
Voltage and Current	+15 V 50 mA -15V 200 mA
Dimensions	134mm ×134mm ×38mm
Weight	1.2KG