CY corrosion mass flow meter adopts internal compensation laminar pressure difference technology, so that the gas can still maintain laminar flow in a large flow range
CY corrosion mass flow meter adopts internal compensation laminar pressure difference technology, so that the gas can still maintain laminar flow in a large flow range. The built-in absolute pressure and temperature sensors fully compensate for the difference between volume flow and mass flow caused by pressure and temperature, and correct the user's standard working conditions. With NIST traceable calibration certificate. It can accurately and quickly measure the mass flow, volume flow, pressure and temperature of corrosive gases (such as NH3, H2S, SiH4, etc.), and is suitable for a variety of flow measurement and control occasions.
Semiconductor manufacturing, photovoltaic equipment, vacuum equipment, material preparation, petrochemical industry, analytical instruments, metal smelting, surface treatment and other fields.
1. High-precision measurement and control
2. Fast response, high repeatability
3. Not affected by temperature and pressure
4. High pressure difference adaptability
5. Maximum working pressure can reach 1500 Psi
6. Digital communication, compatible with analog communication
7. Optional with LCD screen for real-time display
8. High-quality digital application
Accuracy | ± 0.8 %R.D and ± 0.2 %F.S |
Repeatability | ± 0.2 %F.S |
Control scope | 1–100% F.S |
Response time | 10ms |
Temperature accuracy | ±0.75°C |
Operating temperature | −10–60°C |
Pressure accuracy | ±0.5%R.D |
Warm-up time | <1 s |
Analog Communications | 4–20 mA, 0–5 VDC, 1–5 VDC, 0–10 VDC |
Digital Communications | RS-232; RS-485 ;Modbus RTU (over RS-232 or RS-485), Modbus TCP/IP, DeviceNet, EtherCAT, EtherNet/IP, Profibus |
Electrical interface | 6 pin locking, 8 pin mini-DIN, 8 pin M12, DB-9, DB-15 |
Voltage | 9–24 VA (12-24 V if equipped with 4–20 mA / 0-10 V output) |
Current | 40mA (plus 40mA if equipped with 4–20 mA / 0-10V output) |
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