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Corrosion Resistant Series Gas Mass Flow meterCorrosion Resistant Series Gas Mass Flow meterCorrosion Resistant Series Gas Mass Flow meterCorrosion Resistant Series Gas Mass Flow meter

Corrosion Resistant Series Gas Mass Flow meter

    CY corrosion mass flow meter adopts internal compensation laminar pressure difference technology, so that the gas can still maintain laminar flow in a large flow range

CY corrosion mass flow meter adopts internal compensation laminar pressure difference technology, so that the gas can still maintain laminar flow in a large flow range. The built-in absolute pressure and temperature sensors fully compensate for the difference between volume flow and mass flow caused by pressure and temperature, and correct the user's standard working conditions. With NIST traceable calibration certificate. It can accurately and quickly measure the mass flow, volume flow, pressure and temperature of corrosive gases (such as NH3, H2S, SiH4, etc.), and is suitable for a variety of flow measurement and control occasions. 

mass flow meter Application:

Semiconductor manufacturing, photovoltaic equipment, vacuum equipment, material preparation, petrochemical industry, analytical instruments, metal smelting, surface treatment and other fields.

 mass flow meter Features:

1. High-precision measurement and control

2. Fast response, high repeatability

3. Not affected by temperature and pressure

4. High pressure difference adaptability

5. Maximum working pressure can reach 1500 Psi

6. Digital communication, compatible with analog communication

7. Optional with LCD screen for real-time display

8. High-quality digital application

mass flow meter Technical Specifications:

Accuracy

± 0.8 %R.D and ± 0.2 %F.S

Repeatability

± 0.2 %F.S

Control scope

1100% F.S

Response time

10ms

 Temperature accuracy           

±0.75°C

Operating temperature

1060°C

 Pressure accuracy

±0.5%R.D

Warm-up time

<1 s

Analog Communications 

420 mA, 05 VDC, 15 VDC, 010 VDC

Digital Communications

RS-232 RS-485 Modbus RTU (over RS-232 or RS-485), Modbus TCP/IP, DeviceNet,   EtherCAT, EtherNet/IP, Profibus

 Electrical interface

6 pin locking, 8 pin mini-DIN, 8 pin M12,   DB-9, DB-15

Voltage

924 VA (12-24 V if   equipped with 420 mA / 0-10 V output)

Current

40mA (plus 40mA if equipped with 420 mA / 0-10V output)


Contact Us
  • E-mail: cysi@cysi.wang
  • Tel: +86 371 5519 9322
  • Fax: +86 371 8603 6875
  • Add: No. 820, 8th Floor, 1st Unit, 9th Block, Cuizhu Street, High-Tech Zone, Zhengzhou, Henan, China




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