Compact 500W RF Generator with Auto Matching Network for RF Sputtering CY-RF500

Compact 500W RF Generator with Auto Matching Network for RF Sputtering CY-RF500

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RF generator is form a complete set of plasma power supply,it is composed by by the rf power source, impedance matching unit and the impedance of power meter

It is widely used for RF Sputtering, PECVD Chemical Vapor Deposition,and Reactive-ion Etching and etc.

Product Name	RF Generator
RF power	13.56MHz±0.005%
Output Power Range	0-500w, adjustable
Working mode	Continuous output
Display	LCD
RF output Impedance	N-type, female,50Ω
Power stability	≤2w
Maximum reflection power	200w
Componentes armonicos	<-50dBc
Response time	200ms
Control Mode	PLC/RS232/485
Tube Diameter	Φ50,60,80,100mm
Cooling method	Forced air cooling
Dimension	380320450mm
Gross weight	30kg

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Sputtering Targets

Zhengzhou CY Scientific Instrument Co., Ltd. participated in the 2019 Autumn Academic Conference of the Chinese Physical Society Sep. 29, 2019

On September 20-22, 2019, Zhengzhou CY Scientific Instrument Co., Ltd. (referred to as CYKY) participated in the 2019 Chinese Physics Society Fall Conference (CPS Fall Meeting) hosted by Zhengzhou University.

Turkish customers come to our company to test hot isostatic pressing furnace May. 10, 2019

On the afternoon of May 10th, Turkish customers came to our company to conduct a test of the hot isostatic pressing furnace.

Zhengzhou CY Scientific Instrument Co., Ltd. Staff Management Training Apr. 29, 2019

n the morning of April 27, 2019, our company invited Mr. Dou, a well-known marketing and management consultant, career planner and training instructor, to conduct professional management training for all employees of the company according to the actual situation of the company.

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E-mail: cysi@cysi.wang
Tel: +86 371 5519 9322
Fax: +86 371 8603 6875
Add: No. 820, 8th Floor, 1st Unit, 9th Block, Cuizhu Street, High-Tech Zone, Zhengzhou, Henan, China

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