| Furnace Feature | One high thermal conductivity AlN flat sample holder (2"Lx1"W) is fixed on
K type sample, andthe thermal couple with the sample holder can be moved inside quartz tube
driven by a
magnet manually to find desirable temperature position inside tube for
evaporation or deposition.
One NIST certified precision temperature monitor is connected to thermal
couple and
sample holder via a feedthrough on the vacuum flange.
One magnet is embedded inside thermal block, and another magnet is
placed outside tube.
move the outside magnet can move the sample holder with thermal couple
inside tube in or out
30 segment programmable temperature controller is built in furnace to set
up max.
working temperature up to 1200oC at center of furnace
One small quartz crucible is included , which can be used to contain
evaporation material or
please wafer on top for deposition based on your application. |
| Furnace Power | 110VAC or 208 - 240 VAC, 50/60Hz (Please confirm voltage when place order )
1.5 KW |
| Max. Temperature | 1200°C (<1 hour) |
Continuous
Temperature | 1100°C ( continuous) |
| Max. Heating Rate | <= 20 °C/min |
| Heating Zone | Heating Zone Length: 8" (200mm), single zone. The following picture shows
the temp.
distribution across the heating zone, please click to enlarge.
Constant Temp. Zone: 2.3" (60mm) (+/-1°C) @ 1000 °C
You shall measure furnace temperature profile for your own application
before making film growth. |
Temperature
Controller | PID automatic control via solid state relay with 30 steps programmable
Built in Over Temperature and Thermocouple Failure Protection
Optional: The furnace may be operated by PC with installing a control module. |
Temperature
Accuracy | +/- 1°C |
| Heating Elements | Fe-Cr-Al Alloy doped by Mo |
| Tube Size | 2" quartz tube (50mm O.D x 44mm I.D x 800mm L)
Two fibrous ceramic tube blocks are included for blocking heat radiation
from tube chamber.
(Ceramic blocks must be fully inserted into the furnace chamber before
heating)
One small quartz boats is included for placing sample or evaporation
materials. |
| Vacuum Flanges | 2" default flange with 1/4'' Bard fittings, 1/4'' tube feedthrough port
(for 1/4" O.D thermocouple insert) and a KF25 vacuum port |
| Vacuum Level | 10-2torr (by mechanical pump) |
| Dimensions | With lid close: 1055mm(L) × 300mm(W) × 400mm(H) With lid open:
1055mm(L) × 300mm(W) × 560mm(H) |
| Net Weight | 22 Kg |
Shipping
Package Size | 48''(L) x 24''(W) x 28''(H) |
| Shipping Weight | 120 lbs |
| Warranty | One year limited warranty |
| Compliance | CE Certified |
