1200℃ three heating zone low vacuum CVD system consists of a three-heating zone tube furnace, a three-channel mass flow meter and a double stage rotary vane vacuum pump. The three heating zones of the tube furnace are independently temperature controlled by the precision temperature control instrument. By adjusting the temperature of each temperature zone, the tube furnace can form three temperature gradients in the heating zone or form a long constant temperature zone. Each zone can be edited with 30 sections of temperature rise and fall, with overheating and short circuit protection. The flanges on both sides of the furnace tube are equipped with a digital vacuum gauge and a mechanical pressure gauge, which can be used to control the atmosphere in the furnace tube. At the same time, the tube furnace is operated by high-definition true color touch screen, which is easy to use. Even non-professionals can master the use of the instrument after simple training, which can greatly improve your experiment efficiency.
1200℃ three heating zone low vacuum CVD system applications:
It is suitable for high-temperature sintering, metal annealing, quality inspection, etc. in universities, research institutes, industrial and mining enterprises, especially for CVD experiments that require a variety of gas mixing atmospheres.
1200℃ three heating zone low vacuum CVD system technical parameters:
Vacuum tube furnace | Model | CY-O1200-50IIIT |
Tube material | High purity quartz |
Tube diameter | 50mm (Optional 60mm, 80mm, 100mm) |
Tube length | 1300mm |
Furnace chamber length | 1060mm |
Heating zone length | 300mm+300mm+300mm |
Operating temperature | 0～1100℃ |
Temperature control accuracy | ±1℃ |
Temperature control mode | 30 or 50 segment program temperature control |
Display mode | LCD |
Sealing method | 304 stainless steel vacuum flange |
Flange interface | 1/4" ferrule connector, KF16/25/40 joint |
Vacuum | 4.4E-3Pa |
Power supply | AC:220V 50/60Hz |
Gas supply system | Model | CY-3Z |
Gas channel | 3-channel |
Measuring unit | Gas mass flow meter |
Measuring range | A channel: 0～100SCCM H2 gas | Remarks: If you need other ranges or gas types, you need to specify when ordering. According to the customer's specific requirements, the flow meter of the corresponding gas type and range can be selected. |
B channel: 0～300SCCM N2 gas |
C channel: 0～500SCCM Ar gas |
measurement accuracy | ±1.0%F.S |
Pipe pressure resistance | 3MPa |
Working pressure difference | 50～300KPa |
Connecting pipe | 304 stainless steel |
Gas channel | 304 stainless steel needle valve |
Interface specification | 1/4" ferrule connector for gas inlet and outlet |
Exhaust system | Mechanical pump | Rotary vane pump |
Pumping rate | 1.1L/S |
Exhaust interface | KF16 |
Vacuum measurement | Resistance gauge |
Ultimate vacuum | 1.0E-1Pa |
Power supply | AC:220V 50/60Hz |
Pumping interface | KF16 |
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