Anti-Corrosion Three Channel Gas Mixing Control(MFC) Station for CVD System CY-3Z

Flow meter type

mass flow

Flow meter pipe core material

304 stainless steel

Valve type

electromagnetic regulating valve

Pipeline normal condition

close

Gas way

3 gas way

Connector size

1/4"

Measurement accuracy

±1.0%F.S

Linearity

±0.5%F.S

Repeat accuracy

±0.2%F.S

Pressure range

-0.1~0.15Mpa

A way range

0~100SCCM

B way range

0~200SCCM

C way range

0~500SCCM

flow control range

2%-100%

Zero temperature drift

0.6F.S(15-35℃)

Respond time

2S

Working temperature

15-50℃

Working power

AC 220V 50-60Hz