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Single heating zone rotary graphene preparation PECVD furnaceSingle heating zone rotary graphene preparation PECVD furnaceSingle heating zone rotary graphene preparation PECVD furnace

Single heating zone rotary graphene preparation PECVD furnace

    This equipment is a plasma-enhanced rotating graphene preparation system. The equipment is composed of a rotating and tilting mechanism, a single heating zone tube furnace, a plasma generator, a mass flow meter gas delivery system, and a high vacuum molecular pump unit.

This equipment is a plasma-enhanced rotating graphene preparation system. The equipment is composed of a rotating and tilting mechanism, a single heating zone tube furnace, a plasma generator, a mass flow meter gas delivery system, and a high vacuum molecular pump unit. Compared with other graphene preparation equipment, this equipment can provide a higher background vacuum, which can improve the quality of the product; it can use the rotation and tilt mechanism to achieve continuous production, and can make the surface of the particle sample grow products evenly; the plasma generator can significantly reduce the reaction temperature and improve the reaction efficiency.

Technical parameters:

Single heating zone tube furnace

Product model

CY-O1200-100IT

Furnace tube material

High purity quartz

Tube diameter

100mm

Furnace tube length

1500mm

Furnace chamber length

440mm

Heating zone length

400mm

Constant temperature zone head

200mm

Operating temperature

01100

Temperature control accuracy

±1

Temperature control mode

30 or 50 segment program temperature   control

Display mode

HD full color LCD touch screen

Sealing method

304 stainless steel vacuum flange

Power supply

AC: 220V 50/60Hz

RF output system

Power range

0~500W adjustable

working frequency

13.56MHz+0.005%

Working mode

Continuous output

Matched impedance mode

It can be matched, and the glow is evenly distributed throughout the furnace tube

Power stability

2W

Normal working reflected power

3W

Amplified reflected power

70W

Harmonic component

-50dBc

Overall efficiency

70%

Power factor

90%

Supply voltage/frequency

Single-phase AC (187V~153V) frequency   50/60Hz

Control mode

Internal control/PLC analog quantity/RS232/485 communication

Power protection settings

DC over current protection, power amplifier over temperature protection, reflected power protection

Cooling method

Forced air cooling

Glow zone

Under Ar, the radio frequency power supply and the coil cooperate with the glow to fill the furnace tube

Gas delivery system

Flowmeter

Four-channel mass flowmeter

Flow range

MFC1 range: 0~200sccm MFC2 range: 0~200sccm

MFC3 range: 0~500sccm MFC4 range: 0~500sccm

Corresponding to gases H2, CH4, N2, Ar.

Measurement accuracy

±1.5%F.S

Repeatability

±0.2%FS

Linear accuracy

±1%F.S.

Response time

4s

Work pressure

-0.15Mpa~0.15Mpa

Flow control

LCD touch screen control, digital display, each channel gas contains needle valve for individually control.

Intake interface

It can be connected with 1/4NPS or 6mm outer diameter stainless steel pipe

Outlet interface

It can be connected with 1/4NPS or 6mm outer diameter stainless steel pipe

Connection method

Double ferrule connector

Operating temperature

5~45

Gas premix

Equipped with gas premixing device

Exhaust system

Product model

CY-GZK103-A

Molecular pump

Turbomolecular pump

Backing pump

Two-stage rotary vane pump

Pumping rate

Molecular pump: 600L/S

Comprehensive pumping performance: 30 minutes vacuum can reach: 5×10E-3Pa

Rotary   vane pump: 1.1L/S

Ultimate vacuum

5×10E-4Pa

Pumping port

KF40

Exhaust interface

KF16

Vacuum measurement

Compound vacuum gauge

Rotating and tilting device

Speed range

0-20rpm

Tilt angle

0-15°

Material feeding and receiving system

Automatic feeding, automatic collection after tilting


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  • E-mail: cysi@cysi.wang
  • Tel: +86 371 5519 9322
  • Fax: +86 371 8603 6875
  • Add: No. 820, 8th Floor, 1st Unit, 9th Block, Cuizhu Street, High-Tech Zone, Zhengzhou, Henan, China




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