Home > Products > CVD System
PECVD Plasma enhanced chemical vapor deposition coating equipmentPECVD Plasma enhanced chemical vapor deposition coating equipmentPECVD Plasma enhanced chemical vapor deposition coating equipment

PECVD Plasma enhanced chemical vapor deposition coating equipment

    CY-PECVD-450 film coating machine adopts plasma enhanced chemical vapor deposition technology, which can use high-energy plasma to promote the reaction process, effectively increase the reaction speed and reduce the reaction temperature.

CY-PECVD-450 film coating machine adopts plasma enhanced chemical vapor deposition technology, which can use high-energy plasma to promote the reaction process, effectively increase the reaction speed and reduce the reaction temperature.

It is suitable for depositing thin films of silicon nitride, amorphous silicon and microcrystalline silicon on different substrates such as optical glass, silicon, quartz and stainless steel. It has good film-forming quality, less pinholes and is not easy to crack. It is suitable for the preparation of amorphous silicon and microcrystalline silicon thin film solar cell devices. It can be widely used in the scientific research and small batch preparation of thin film materials in Colleges and universities and scientific research institutes.

Technical parameter of PECVD film coating equipment:

Model

CY-PECVD-450

Vacuum chamber

front opening door, φ300mm x 300mm, stainless steel

viewing window: φ100mm with baffle

Vacuum pump set

Backing pump: rotary vane pump   pumping speed: 1.1L/s

Secondary pump: Turbo molecular pump  pumping speed: 600L/s

Ultimate vacuum

1.0E-6Pa

1.0E-4Pa (Within 30 minutes)

Vacuum (deposition)

0.133~133Pa, adjusted according to the process

RF power

13.56MHz, 500W (automatch)

Flow control

Mass flowmeter(default Ar,0~200sccm)

Dimensions

1100mm x 800mm x1100mm


Disclaimer: The product introduction content (including product images, product descriptions, technical parameters, etc.) of this site is for reference only. As the update may not be timely, there will be some differences between the content and the actual situation. Please contact our sales staff to confirm. The information provided on this site does not constitute any offer or promise, and the company will periodically improve and modify the website information, without prior notice, please understand.

Contact Us
  • E-mail: cysi@cysi.wang
  • Tel: +86 371 5519 9322
  • Fax: +86 371 8603 6875
  • Add: No. 820, 8th Floor, 1st Unit, 9th Block, Cuizhu Street, High-Tech Zone, Zhengzhou, Henan, China




Follow Us

Copyright © Zhengzhou CY Scientific Instrument Co., Ltd. All Rights Reserved    Update cookies preferences

| Sitemap |       Technical Support: