CY-O1200-50IS-PECVD is a CE certified splittable single zone tube furnace with 60mm diameter quartz tube, mechanical vacuum pump and four channel gas flowing system and a 13.56MHz rf generator.It can achieve a maximum vacuum up to 10-2 torr and mix 1-4 types of gases for CVD or diffusion.It is widely used for laboratory thin film preparation
Model No. | CY-O1200-50IS-PECVD |
RF frequency | 13.56 MHz 0.005% stability |
Output Power | 5 -300W adjustable with ±1% stability |
RF Output Port | 50 Ω, N-type, female |
Matching | Automatic |
Display | LED digital gauge |
Limiting temperature | 1200℃ |
Working temperature | ≤1100℃ |
Heating rate | 0-20℃/min |
Heating Zone length | 200mm, constant temperature zone:80mm |
Quartz tube diameter | OD50*1000mm |
Temperature accuracy | ± 1℃ |
Heating element | Fe-Cr-Al alloy adopt by Mo |
Thermal couple | K TYPE |
Cooling method | Double layer structure with fan cooling |
Temperature control | 30 steps programmable PID control |
Chamber material | Alumina fiber |
Vacuum pump | Mechanical rotary vacuum pump:10-2Torr |
Cooling method | Air cooling |
Connection pipe | stainless steel bellows, manual flap valve |
Gas Mixer | 4 way gas mixer |
Accuracy | ±2%F.S. |
Repeat accuracy | ±0.2% FS |
Linear precision | ±1%F.S. |
Working pressure: | -0.1MPa~0.15MPa |
MFC1 Range | 0~100SCCM |
MFC2 Range | 0~200SCCM |
MFC3 Range | 0~200SCCM |
MFC4 Range | 0~500SCCM |
Working voltage | AC220V,50Hz |
Copyright © Zhengzhou CY Scientific Instrument Co., Ltd. All Rights Reserved Update cookies preferences
| Sitemap | Technical Support: