This CY-O1200-50IS-3Z10V compact cvd tube furnace is combined with a mini tube furnace, a 3 gas way mixer station and one two stage rotary vacuum pump. It is desiged for laboratory thin film preparation and small sample high temperature annealing
Model No. | CY-O1200-50IS-3Z10V |
Display | LED digital gauge |
Limiting temperature | 1200℃ |
Working temperature | ≤1100℃ |
Heating rate | 0-20℃/min |
Heating Zone length | 200mm, constant temperature zone:80mm |
Quartz tube diameter | OD50*700mm |
Temperature accuracy | ± 1℃ |
Heating element | Fe-Cr-Al alloy adopt by Mo |
Thermal couple | K TYPE |
Cooling method | Double layer structure with fan cooling |
Temperature control | 30 steps programmable PID control |
Chamber material | Alumina fiber |
Vacuum pump | Mechanical rotary vacuum pump:10-2Torr |
Cooling method | Air cooling |
Connection pipe | stainless steel bellows, manual flap valve |
Gas Mixer | 3 way gas mixer |
Working pressure: | -0.1MPa~0.15MPa |
MFC1 Range | 0~100SCCM |
MFC2 Range | 0~200SCCM |
MFC3 Range | 0~500SCCM |
Working voltage | AC220V,50Hz |
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