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Plasma Enhanced CVD system CY-PECVD-T01

Plasma Enhanced CVD system CY-PECVD-T01

    Plasma enhanced CVD system consists of a plasma generator, a three-heating zone tube furnace, a single-heating zone tube furnace, an RF power supply, and a vacuum system.

In order for the chemical reaction to take place at a lower temperature, the activity of the plasma is utilized to promote the reaction, and thus the CVD is called plasma enhanced chemical vapor deposition (PECVD). The PECVD graphene film preparation device ionizes a gas containing a film constituent atom by means of a RF output of 13.56 Mhz, forms a plasma in a vacuum chamber, utilizes strong chemical activity of the plasma, improves reaction conditions, and utilizes plasma activity to promote the reaction, then deposits a desired film on the substrate.

Plasma Enhanced CVD system application range:

This equipment can be used in various test places such as graphene preparation, sulfide preparation, and nanometer material preparation. Various films such as SiOx, SiNx, amorphous silicon, microcrystalline silicon, nano-silicon, SiC, diamond-like, etc. can be deposited on the surface of a sheet or similar shaped sample, and p-type and n-type doped films can also be deposited. The deposited film has good uniformity, compactness, adhesion, and insulation. It is widely used in the fields of cutters, high-precision molds, hard coatings, high-end decoration, etc.

Plasma Enhanced CVD system technical parameters:

Three-heating zone tube furnace

Model

CY-O1200-50IIIT

Tube material

High purity quartz

Tube diameter

50mm

Tube length

2830mm

Furnace chamber length

660mm

Heating zone length

200mm+200mm+200mm

Operating temperature

0~1100℃

Temperature control accuracy

±1℃

Temperature control mode

30 or 50 segment program temperature control

Display mode

LCD

Sealing method

304 stainless steel vacuum flange

Flange interface

1/4" ferrule connector, KF16/25/40 joint

Vacuum

4.4E-3Pa

Power supply

AC:220V 50/60Hz

Single-heating zone tube furnace

Model

CY-O1200-50IT

Tube material

High purity quartz

Tube diameter

50mm

Tube length

2830mm

Furnace chamber length

440mm

Heating zone length

400mm

Constant   temperature zone

200mm

Operating   temperature

01100

Temperature control accuracy

±1

Temperature control mode

30 or 50 segment program temperature control

Display mode

LCD

Sealing method

304 stainless steel vacuum flange

Flange interface

1/4" ferrule connector, KF16/25/40 joint

Vacuum

4.4E-3Pa

Power supply

AC:220V 50/60Hz

RF output system

Power range

0~500W adjustable

Working frequency

13.56MHz+0.005%

Working mode

Continuous output

Display mode

LCD

Matched impedance mode

Can match, the glow is evenly covered with three heating zone furnace tubes

Power stability

≤2W

Normal working reflected power

≤3W

Amplified reflected power

≤70W

Harmonic component

-50dBc

Machine efficiency

70%

Power Factor

≥90%

Supply voltage / frequency

Single-phase AC (187V~153V) Frequency 50/60Hz

Control mode

Internal control / PLC analog / RS232 / 485 communication

Power protection settings

DC overcurrent protection, power amplifier over temperature protection, reflected power protection

cooling method

Forced air cooling

Glow length

In the Ar, the RF power supply and the coil are combined to glow and the glow can fill the length of the furnace in three heating zones.

Gas supply system

Four-channel mass flowmeter

Mass flowmeter

Flow range

MFC1 range: 0~200sccm 

MFC2 range:   0~200sccm

MFC3 range: 0~500sccm 

MFC4 range: 0~500sccm

Corresponding to gases H2, CH4, N2, Ar,

measurement accuracy

±1.5%F.S

Repeatability

±0.2%FS

Linear precision

±1%F.S.

Response time

≤4s

Work pressure

-0.15Mpa~0.15Mpa

flow control

LCD touch screen control, digital display, each-channel gas contains a needle valve for individual control

Intake interface

Can be connected to 1/4NPS or 6mm outer   diameter stainless steel tube

Outlet interface

Can be connected to 1/4NPS or 6mm outer   diameter stainless steel tube

Connection method

Double ferrule connector

Operating temperature

5~45℃

Gas premix

Equipped with gas premixing device

Exhaust system

Mechanical pump

Rotary vane pump

Pumping rate

1.1L/S 

Exhaust interface

KF16

Vacuum measurement

Resistance gauge

Ultimate vacuum

1.0E-1Pa

Power supply

AC:220V 50/60Hz

Pumping interface

KF16

Rail

Rail length

2.5m~3m

It can realize the sliding of one furnace position length in the three-heating zone furnace to achieve rapid temperature rise and fall.

Disclaimer: The product introduction content (including product images, product descriptions, technical parameters, etc.) of this site is for reference only. As the update may not be timely, there will be some differences between the content and the actual situation. Please contact our sales staff to confirm. The information provided on this site does not constitute any offer or promise, and the company will improve and modify any information on the website from time to time without prior notice.

Contact Us
  • E-mail: cysi@cysi.wang
  • Tel: +86 371 5519 9322
  • Fax: +86 371 8603 6875
  • Add: No. 820, 8th Floor, 1st Unit, 9th Block, Cuizhu Street, High-Tech Zone, Zhengzhou, Henan, China




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