In order for the chemical reaction to take place at a lower temperature, the activity of the plasma is utilized to promote the reaction, and thus the CVD is called plasma enhanced chemical vapor deposition (PECVD). The PECVD graphene film preparation device ionizes a gas containing a film constituent atom by means of a RF output of 13.56 Mhz, forms a plasma in a vacuum chamber, utilizes strong chemical activity of the plasma, improves reaction conditions, and utilizes plasma activity to promote the reaction, then deposits a desired film on the substrate.
Plasma Enhanced CVD system application range:
This equipment can be used in various test places such as graphene preparation, sulfide preparation, and nanometer material preparation. Various films such as SiOx, SiNx, amorphous silicon, microcrystalline silicon, nano-silicon, SiC, diamond-like, etc. can be deposited on the surface of a sheet or similar shaped sample, and p-type and n-type doped films can also be deposited. The deposited film has good uniformity, compactness, adhesion, and insulation. It is widely used in the fields of cutters, high-precision molds, hard coatings, high-end decoration, etc.
Plasma Enhanced CVD system technical parameters:
Three-heating zone tube furnace | Model | CY-O1200-50IIIT |
Tube material | High purity quartz |
Tube diameter | 50mm |
Tube length | 2830mm |
Furnace chamber length | 660mm |
Heating zone length | 200mm+200mm+200mm |
Operating temperature | 0～1100℃ |
Temperature control accuracy | ±1℃ |
Temperature control mode | 30 or 50 segment program temperature control |
Display mode | LCD |
Sealing method | 304 stainless steel vacuum flange |
Flange interface | 1/4" ferrule connector, KF16/25/40 joint |
Vacuum | 4.4E-3Pa |
Power supply | AC:220V 50/60Hz |
Single-heating zone tube furnace | Model | CY-O1200-50IT |
Tube material | High purity quartz |
Tube diameter | 50mm |
Tube length | 2830mm |
Furnace chamber length | 440mm |
Heating zone length | 400mm |
Constant temperature zone | 200mm |
Operating temperature | 0～1100℃ |
Temperature control accuracy | ±1℃ |
Temperature control mode | 30 or 50 segment program temperature control |
Display mode | LCD |
Sealing method | 304 stainless steel vacuum flange |
Flange interface | 1/4" ferrule connector, KF16/25/40 joint |
Vacuum | 4.4E-3Pa |
Power supply | AC:220V 50/60Hz |
RF output system | Power range | 0~500W adjustable |
Working frequency | 13.56MHz+0.005% |
Working mode | Continuous output |
Display mode | LCD |
Matched impedance mode | Can match, the glow is evenly covered with three heating zone furnace tubes |
Power stability | ≤2W |
Normal working reflected power | ≤3W |
Amplified reflected power | ≤70W |
Harmonic component | ≤-50dBc |
Machine efficiency | ≥70% |
Power Factor | ≥90% |
Supply voltage / frequency | Single-phase AC (187V~153V) Frequency 50/60Hz |
Control mode | Internal control / PLC analog / RS232 / 485 communication |
Power protection settings | DC overcurrent protection, power amplifier over temperature protection, reflected power protection |
cooling method | Forced air cooling |
Glow length | In the Ar, the RF power supply and the coil are combined to glow and the glow can fill the length of the furnace in three heating zones. |
Gas supply system | Four-channel mass flowmeter | Mass flowmeter |
Flow range | MFC1 range: 0~200sccm MFC2 range: 0~200sccm MFC3 range: 0~500sccm MFC4 range: 0~500sccm Corresponding to gases H2, CH4, N2, Ar, |
measurement accuracy | ±1.5%F.S |
Repeatability | ±0.2%FS |
Linear precision | ±1%F.S. |
Response time | ≤4s |
Work pressure | -0.15Mpa~0.15Mpa |
flow control | LCD touch screen control, digital display, each-channel gas contains a needle valve for individual control |
Intake interface | Can be connected to 1/4NPS or 6mm outer diameter stainless steel tube |
Outlet interface | Can be connected to 1/4NPS or 6mm outer diameter stainless steel tube |
Connection method | Double ferrule connector |
Operating temperature | 5~45℃ |
Gas premix | Equipped with gas premixing device |
Exhaust system | Mechanical pump | Rotary vane pump |
Pumping rate | 1.1L/S |
Exhaust interface | KF16 |
Vacuum measurement | Resistance gauge |
Ultimate vacuum | 1.0E-1Pa |
Power supply | AC:220V 50/60Hz |
Pumping interface | KF16 |
Rail | Rail length | 2.5m~3m It can realize the sliding of one furnace position length in the three-heating zone furnace to achieve rapid temperature rise and fall. |
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