Stainless Steel Bubbler for CVD Liquid Precursors

Stainless Steel Bubbler for CVD Liquid Precursors

In typical CVD processes, The Bubbler/Flash Evaporator is used for transporting chemical precursors and liquid sources in the vapor phase

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In typical CVD processes, The Bubbler/Flash Evaporator is used for transporting chemical precursors and liquid sources in the vapor phase. Such a unit features two stainless steel needle valves with 1/4'' Tube Fittings allow carrier gas bubble through the liquid sources to enhance evaporation. Its leak-free 316 Stainless Steel vessel is able to withstand pressure up to 0.15Mpa @ 250°C. Please choose150mL, 300mL, 600mL and 1000 mL at product option bar.

Stainless Steel Bubbler SPECIFICATIONS:

Product Name	Stainless Steel Bubbler
Model	BL-SS-150	BL-SS-300	BL-SS-600	BL-SS-1000
Vessel Volume	150ml	300ml	600ml	1000ml
Vessel Dimensions	Inner: Φ45 x 84mm Outer: Φ51 x 104mm	Inner: Φ45 x 180mm Outer: Φ51 x 187mm	Inner: Φ70 x 154mm Outer: Φ76 x 200mm	Inner: Φ70 x 258mm Outer: Φ76 x 300mm
Overall Dimensions	130x70x340mm (LxWxH)	130x70x440mm (LxWxH)	130x90x440mm (LxWx H)	130x90x540mm (LxWxH)
Heating Capability	Optional Heating Jacket EQ-HC-BL with built-in K-type thermocouple Max. Heating Temperature 250C.
Heating Capability	150°C max. heat temp	150°C max. heat temp	150°C max. heat temp	150°C max. heat temp
Vessel Material	316 Stainless Steel
O-ring	Perfluoroelastomer (FFKM)
Sealing Material in Valve	Soft PTFE
Pressure Gauge	-0.1 ~ 0.15 Mpa
Max. Pressure	0.15Mpa
Fittings	Two SS needle valves with 1/4" Tube Fittings (PTFE frit as sealant)
Application Notes	The vessel should be cleaned after each use to prevent contaminants and bacteria build-up. Never heat the source liquid inside the vessel near its boiling point without opening valve You may order precision MFC to deliver vapor ( click picture below-left 1 ) Please (click the picture below-right 3) to see our updated Compact Liquid Vaporization Systems for CVD