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Three Source high vacuum thermal evaporation coater for Solar batteryThree Source high vacuum thermal evaporation coater for Solar batteryThree Source high vacuum thermal evaporation coater for Solar batteryThree Source high vacuum thermal evaporation coater for Solar battery

Three Source high vacuum thermal evaporation coater for Solar battery

    Three Source High Vacuum Evaporation Coater Application areas:Metal and Dielectric Films,Manufacture of thin film sensors,Optical element,Nano and Microelectronics,Solar battery


This equipment is a high-vacuum coater with three evaporation sources. The equipment adopts a front door type vacuum chamber design, which has a large chamber space and strong expandability, which can meet the evaporation coating of multi-style and large-size samples. The chamber is equipped with an upper sample stage, and the clamping or clamping sample mounting parts can be selected according to the user's sample style. The sample stage is rotatable, heated, and all operations are integrated through the touchscreen. The vacuum pump group of the equipment is a two-stage vacuum system, which consists of a bipolar rotary vane vacuum pump and a turbo molecular pump, which can provide a clean and oil-free high vacuum environment for vacuum coating experiments; the vacuum system contains a complete pneumatic valve system, users can One-button operation through the touch screen realizes operations such as vacuum extraction, non-stop sampling, and complete shutdown.

Detail intruduction:

There are three groups of evaporation sources in this equipment, which are tungsten boat evaporation sources and water-cooled copper electrodes, which can support a maximum current of 260A, and the heating temperature can reach up to 1800. It can realize the evaporation of various refractory metals. The three groups are independent Thermal evaporation source, will not cause mutual contamination of plating materials. The equipment adopts an integrated design, the cavity and the electric control part are separated left and right, which realizes the separation of water and electricity, and effectively ensures the safety of users. The electronic control part adopts the design of the combination of touch screen and button panel. Auxiliary functions such as vacuum system and sample stage are operated by one button on the touch screen, and power-on evaporation and film thickness control are operated independently through the panel, which is as convenient as possible for users at the same time. Avoid the possibility of misuse. The equipment has perfect design and excellent performance, and is a must-have for high-precision evaporation coating experiments in laboratories.

Three Source High Vacuum Evaporation Coater Application areas:Metal and Dielectric Films,Manufacture of thin film sensors,Optical element,Nano and Microelectronics,Solar battery

Technical parameter:

 

product name

Three Source High Vacuum Evaporation   Coater

Product number

CY-EVH300-III-HHH-SS

Sample stage

Size

Maximum support φ150mm sample

Function

Rotatable, heating up to 500°C

Evaporation source

Quantity

Tungsten boat x3

Power

Each evaporation source is equipped with   an independent power supply; three evaporation sources have a total of three   independent power supplies

Vacuum chamber

Cavity size

φ300x400mm

Observation window

Front φ100mm

Cavity material

304 stainless steel

Open method

Front door

Film thickness control (optional)

Crystal-type film thickness measuring   instrument, optional multi-channel film thickness controller

Vacuum system

Foreline pump

Bipolar Rotary Vane Pump

Exhaust port

KF16

Secondary pump

Turbomolecular pump

Exhaust port

ISO160

Vacuum measurement

Resistance + Ionization

Composite vacuum gauge

Exhaust rate

Mechanical pump 1.1L/s

Molecular pump 600L/s

Ultimate vacuum

1.0E-5Pa

Power supply

AC 220V 50/60Hz

Pumping rate

Rotary vane pump: 1.1L/S

Control System

PLC automatic control

Operation interface: touch screen +   operation panel

(touch screen controls deposition process   and fast data entry; user friendly PLC software system, can be updated via   network)

 

Other

Supply voltage

AC220V,50Hz

Overall size

1200mm X 900mm X 1650mm

Total power

5kW

Total Weight

500kg

 


Contact Us
  • E-mail: cysi@cysi.wang
  • Tel: +86 371 5519 9322
  • Fax: +86 371 8603 6875
  • Add: No. 820, 8th Floor, 1st Unit, 9th Block, Cuizhu Street, High-Tech Zone, Zhengzhou, Henan, China




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