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Desktop thermal evaporation coater with water cooled sample tableDesktop thermal evaporation coater with water cooled sample tableDesktop thermal evaporation coater with water cooled sample tableDesktop thermal evaporation coater with water cooled sample tableDesktop thermal evaporation coater with water cooled sample table

Desktop thermal evaporation coater with water cooled sample table

    Desktop thermal evaporation coater with water cooled sample table is a small desktop evaporation coater ,which is installed with tungsten basket evaporation source it can can meet the evaporation of a variety of common metal and part of non-metal

Desktop thermal evaporation coater with water cooled sample table is a small desktop evaporation coater ,which is installed with tungsten basket evaporation source ,it can provide a maximum of 100A coating current,the maximum evaporating temperature up to 1800℃,and can meet the evaporation of a variety of common metal and part of non-metal. The vacuum chamber is made of stainless steel and has been degassed before delivery. It can reach the limit vacuum of 5x10-5Pa with the molecular pump group, which can meet the vacuum environment required by the evaporation of most materials; At the same time, the equipment adopts the design of high tank and water-cooled sample platform, which can reduce the heat radiation of the evaporation source to the sample, ensure the surface of the sample is not over temperature and maintain at room temperature .It can effectively prevent the sample from being damaged by the high temperature of heat evaporation, especially suitable for the coating of various polymer film samples.

Desktop thermal evaporation coater

Desktop thermal evaporation coater technical parameter:

Product   Name

Desktop thermal evaporation  coater with water cooled sample table

Product   Model

CY-EVP195S-2S-WTT means tall tankW means water cooled sample table

Installation   Condition

1Working environment temperature: 25±15℃,humidity: 55%Rh±10%Rh

2Equipment power supplyAC220V50Hz must be well grounded

3Rated power2500w

4Equipment for gas The equipment chamber should be filled with argon   gas for cleaning. The customer should prepare argon gas with purity ≥99.99%.

5Table size requirements: 600mm×600mm×700mmbearing capacity ≥ 70kg

6The position should be well ventilated and cooled.

Technical   Indicators

1、  Number of evaporation sources: 2, each evaporation source is   equipped with baffle;

2、 Evaporation source voltage: 10V

3、 The evaporation current is continuously adjustable from 0 to 100A

4、 With two tungsten boat, two tungsten basket;

5、 Stainless steel water-cooled rotating upper sample platform, diameter   is 100mm, rotating speed 1~20rpm continuously adjustable;  

6、 The distance between the sample platform and the evaporation source is   300mm;

7、 The water cooling interface of the sample table is φ6mm quick plug   connector, which needs to be equipped with circulating water cooler. 

8、 The vacuum cavity is a stainless steel cavity with an outside diameter   of 195mm ,  an inside diameter 185mm   and a height of 350mm;

9、 Quartz observation window with baffle, size ofφ60mm

10、 The air pumping interface of the vacuum chamber is KF40;

11、 Air intake interface is 1/4 inch double ferrule joint ,stainless steel fine-tuning   valve is provided by default to adjust the air intake;

12、 Touch screen is 7inch color touch screen;

13、 Adjustable sputtering current sputtering   safety current value and safety vacuum value can be set

14、  safety protection: over current, vacuum is too low automatically   cut off the sputtering current;

15、 Ultimate vacuum1Pa(matching double stage rotary vane pump)

16、 Vacuum measurement is Parana vacuum gauge the range is1105Pa

Notice

1、In order to give full play to the vacuum performance of the cavity, it   is recommended to use it with molecular pump group.

2、It is recommended to buy CW3000 water cooler or better circulation   water cooler.

Optional accessory

Film

thickness Monitor

1Film thickness resolution0.0136Åaluminum

2Accuracy of film thickness ±0.5%it depends on process conditions, especially sensor position, material   stress, temperature and density  

3Measuring speed100ms to 1s per times measurement   range can be set 500000Åaluminum

4Standard sensor crystal6MHz

5Suitable for wafer frequency6MHz

suitable   for wafer sizeΦ14mm

mounting   flangeCF35

Another   Accessory

1、 tungsten boat, tungsten basket;

2、 Organic evaporation source (including quartz boat and tungsten wire   heating source)

3、 The number of evaporation sources can be selected 1~2 groups;

4、 CY-CZK103 series high performance molecular pump set(including   composite vacuum gauge, measuring range 10-5Pa~105Pa);

CY-GZK60 series small molecular pump set(including   composite vacuum gauge, measuring range 10-5Pa~102Pa)

VRD-4   bipolar rotary vane vacuum pump

5、 CW3000 circulating water cooler(air cooled ,flow rate 10L per minute)

6、 KF40 Vacuum bellows; The length can be 0.5m, 1m or 1.5m. KF40 clamp   bracket;

7、 Film thickness meter crystal oscillator;


Contact Us
  • E-mail: cysi@cysi.wang
  • Tel: +86 371 5519 9322
  • Fax: +86 371 8603 6875
  • Add: No. 820, 8th Floor, 1st Unit, 9th Block, Cuizhu Street, High-Tech Zone, Zhengzhou, Henan, China




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