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Desktop thermal evaporation coater with quartz cavityDesktop thermal evaporation coater with quartz cavityDesktop thermal evaporation coater with quartz cavityDesktop thermal evaporation coater with quartz cavity

Desktop thermal evaporation coater with quartz cavity

    Desktop thermal evaporation coater with quartz cavity is a small desktop thermal evaporating coater ,it can provide a maximum of 100A coating current,the maximum evaporating temperature up to 1800℃,and can meet the evaporation of a variety of common metal and part of non-metal

Desktop thermal evaporation coater with quartz cavity is a small desktop thermal evaporating coater ,it can provide a maximum of 100A coating current,the maximum evaporating temperature up to 1800℃,and can meet the evaporation of a variety of common metal and part of non-metal. The vacuum chamber is made of high purity quartz , which is easy to observe the coating process and easy to clean ;When coordinating with the molecular pump group it can achieve the limit vacuum of 5x10-4 Pa ,  which can effectively ensure the purity and binding force of the evaporated film .

Desktop thermal evaporation coater with quartz cavity

thermal evaporation coater technical parameter:

Product Name

Desktop thermal evaporation coater with quartz cavity

Product Model

CY-EVP180G-1S-A

Installation Condition

1Working   environment temperature: 25±15humidity: 55%Rh±10%Rh

2Equipment   power supplyAC220V50Hz must be well grounded

3Rated power1200w

4Equipment for   gas The equipment   chamber should be filled with argon gas for cleaning. The customer should   prepare argon gas with purity ≥99.99%.

5Table size   requirements: 600mm×600mm×700mmbearing capacity ≥ 50kg

6The position   should be well ventilated and cooled.

Technical Indicators

1、 evaporation source voltage: 10V

2、 The evaporation current is continuously adjustable   from 0 to 100A

3、 With a tungsten boat, a tungsten basket;

4、  Stainless steel rotating upper sample table,   diameter of 60mm;

5、  The distance between the sample platform and   the evaporation source is adjustable from 60 to 100mm;

6、 The vacuum cavity is a quartz cavity with a diameter   of 180mm and a height of 200mm;

7、 The air pumping interface of the vacuum chamber is   KF25

8、 Air intake interface is 1/4 inch double ferrule   joint

9、 Touch screen is 7inch color touch screen

10、 Adjustable sputtering current sputtering safety current value and safety vacuum   value can be set

11、  safety protection: over current, vacuum is too   low automatically cut off the sputtering current

12、 Ultimate vacuum5E-4Pa (matching molecular pump)

13、 Vacuum measurement is Parana vacuum gauge the range is1105Pa

Notice

1. For the materials that   are sensitive to oxygen, it is recommended to add molecular pump group. 

2In order to achieve a   high oxygen free environment, the vacuum chamber should be cleaned at least 3   times with high purity inert gas.

Optional   accessory

Film

thickness   Monitor

1Film thickness resolution0.0136Åaluminum

2Accuracy of film   thickness ±0.5%it depends on process   conditions, especially sensor position, material stress, temperature and density    

3Measuring speed100ms to 1s per times measurement range can be   set 500000Åaluminum

4Standard sensor crystal6MHz

5Suitable for wafer   frequency6MHz  

suitable for wafer sizeΦ14mm

mounting flangeCF35

Another Accessory

1tungsten boat, tungsten   basket;

2Organic evaporation   source (including quartz boat and tungsten wire heating source)

3CY-CZK103 series high   performance molecular pump set(including composite vacuum gauge, measuring   range 10-5Pa~105Pa);

CY-GZK60 series small molecular pump set(including   composite vacuum gauge, measuring range 10-5Pa~102Pa)

VRD-4 bipolar rotary vane   vacuum pump

4KF25 Vacuum bellows; The   length can be 0.5m, 1m or 1.5m. KF25 clamp bracket;

5Film thickness meter   crystal oscillator;


Contact Us
  • E-mail: cysi@cysi.wang
  • Tel: +86 371 5519 9322
  • Fax: +86 371 8603 6875
  • Add: No. 820, 8th Floor, 1st Unit, 9th Block, Cuizhu Street, High-Tech Zone, Zhengzhou, Henan, China




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