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Desktop thermal evaporation coater with electric lifting sample platformDesktop thermal evaporation coater with electric lifting sample platformDesktop thermal evaporation coater with electric lifting sample platformDesktop thermal evaporation coater with electric lifting sample platformDesktop thermal evaporation coater with electric lifting sample platform

Desktop thermal evaporation coater with electric lifting sample platform

    Desktop thermal evaporation coater with electric lifting sample platform is a small desktop evaporation coater ,which is installed with tungsten basket evaporation source ,it can provide a maximum of 100A coating current,the maximum evaporating temperature up to 1800℃

Desktop thermal evaporation coater with electric lifting sample platform is a small desktop evaporation coater ,which is installed with tungsten basket evaporation source ,it can provide a maximum of 100A coating current,the maximum evaporating temperature up to 1800℃,and can meet the evaporation of a variety of common metal and part of non-metal. The vacuum chamber is made of stainless steel and has been degassed before delivery. It can reach the limit vacuum of 5x10-5Pa with the molecular pump group, which can meet the vacuum environment required by the evaporation of most materials; At the same time, the equipment adopts the design of high tank and water-cooled sample platform, which can reduce the heat radiation of the evaporation source to the sample, ensure the surface of the sample is not over temperature and maintain at room temperature .It can effectively prevent the sample from being damaged by the high temperature of heat evaporation, especially suitable for the coating of various polymer film samples.

Desktop thermal evaporation coater

Desktop thermal evaporation coater technical parameter:

Product Name

Desktop   thermal evaporation coater with electric lifting sample platform

Product Model

CY-EVP195S-1S-LTT means tall tank L means   lift

Installation Condition

1Working   environment temperature: 25±15humidity: 55%Rh±10%Rh

2Equipment   power supplyAC220V50Hz must be well grounded

3Rated power2500w

4Equipment for   gas The equipment   chamber should be filled with argon gas for cleaning. The customer should   prepare argon gas with purity ≥99.99%.

5Table size   requirements: 600mm×600mm×700mmbearing capacity ≥ 70kg

6The position   should be well ventilated and cooled.

Technical Indicators

1、  Number of evaporation sources: 2, each   evaporation source is equipped with baffle;

2、 Evaporation source voltage: 10V

3、 The evaporation current is continuously adjustable   from 0 to 100A

4、 With 1 tungsten boat,1 tungsten basket;

5、 Stainless steel electric lifting sample platform,   diameter is 100mm, rotating speed 1~20rpm continuously adjustable;

6、 The distance between the sample and the evaporation   source is continuously adjustable from 190 to 300mm, and can also be adjusted   up and down under the vacuum state;

7、 The vacuum cavity is a stainless steel cavity with   an outside diameter of 195mm ,  an   inside diameter 185mm and a height of 350mm;

8、 The   upper cover is sealed with ISO flange for easy disassembly and   inspection; 

9、 The cavity is provided with a front door and a   quartz observation window with a baffle ;size   ofφ60mm

10、 The air pumping interface of the vacuum chamber is   KF40;

11、 Air intake interface is 1/4 inch double ferrule   joint ,stainless steel fine-tuning valve is provided by default to   adjust the air intake;

12、 Touch screen is 7inch color touch screen;

13、 Adjustable sputtering current sputtering safety current value and safety vacuum   value can be set

14、  safety protection: over current, vacuum is too   low automatically cut off the sputtering current;

15、 Ultimate vacuum1Pa(matching double stage rotary vane pump)

Notice

1、In order to give full play to the vacuum performance of the cavity, it   is recommended to use it with molecular pump group.

Optional accessory

Film

thickness Monitor

1Film thickness   resolution0.0136Åaluminum

2Accuracy of   film thickness ±0.5%it depends on   process conditions, especially sensor position, material stress, temperature   and density  

3Measuring   speed100ms to 1s   per times measurement   range can be set 500000Åaluminum

4Standard   sensor crystal6MHz

5Suitable for   wafer frequency6MHz

suitable for wafer sizeΦ14mm

mounting flangeCF35

Another Accessory

1、 tungsten boat, tungsten basket;

2、 Organic evaporation source (including quartz boat   and tungsten wire heating source)

3、 The number of evaporation sources can be selected   1~2 groups;

4、 CY-CZK103 series high performance molecular pump   set(including composite vacuum gauge, measuring range 10-5Pa~105Pa);

CY-GZK60 series small   molecular pump set(including composite vacuum gauge, measuring range   10-5Pa~102Pa)

VRD-4 bipolar rotary vane vacuum pump

5、 CW3000 circulating water cooler(air cooled ,flow   rate 10L per minute)

6、 KF40 Vacuum bellows; The length can be 0.5m, 1m or   1.5m. KF40 clamp bracket;

7、 Film thickness meter crystal oscillator;


Contact Us
  • E-mail: cysi@cysi.wang
  • Tel: +86 371 5519 9322
  • Fax: +86 371 8603 6875
  • Add: No. 820, 8th Floor, 1st Unit, 9th Block, Cuizhu Street, High-Tech Zone, Zhengzhou, Henan, China




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