The small plasma sputtering and evaporation two-in-one coating machine is equipped with DC sputtering target and thermal evaporation assembly, which can not only be used for metal film plating by plasma sputtering, but also obtain carbon or other metal elemental films by evaporation.
The instrument components are highly integrated, which realize two kinds of coating functions in the same chamber. This coating machine adopts high purity quartz chamber as vacuum chamber, and the coating process is completely visible. The instrument is equipped with two stage rotary vane vacuum pump, which can quickly reach the vacuum degree of 1.0E-1pa, and can meet the vacuum environment required by most evaporation coating experiments and diode sputtering experiments. This instrument has small size which can save space and can be used on the test bench. One machine has multiple purposes, which is cost-effective and very suitable for major universities and research institutions to choose.
Small two-in-one coating machine applications:
Scanning electron microscope sample surface gold spraying, gold steaming carbon spraying and other operations, as well as the production of non-conductor material test electrode.
Technical parameters:
Small two-in-one coating machine CY-EVS180G-LV |
Sample Stage | Size | φ80mm | Distance to the evaporation source | 20mm~50mm adjustable |
DC sputtering head | Number | 2” ×1 |
|
|
Evaporation system | Evaporation source | Tungsten wire basket | Max Temperature | 1700℃ |
Thermal couple | S type thermocouple |
|
|
Vacuum Chamber | Chamber Size | φ180mm×100mm | Watch Window | Omnidirectional transparency |
Chamber Material | High purity quartz | Opening mode | Top cover removable |
Vacuum System | Mechanical Pump | Rotary vane pump | Pumping connector | KF16 |
vacuum measurement | Resistance gauge | Exhaust connector | KF16 |
Ultimate vacuum | 1.0E-1Pa | Power Supply | AC;220V 50/60Hz |
Pumping rate | Rotary vane pump：1.1L/S |
Sputter Power Configuration | Number | DC power supply x1 | Max Power Output | 150w |
Other | Supply Voltage | AC220V,50Hz | Overall size | 360mm×300mm×470mm |
Total power | 1.5kw | Total Weight | 15kg |
Disclaimer: The product introduction content (including product images, product descriptions, technical parameters, etc.) of this site is for reference only. As the update may not be timely, there will be some differences between the content and the actual situation. Please contact our sales staff to confirm. The information provided on this site does not constitute any offer or promise, and the company will periodically improve and modify the website information, without prior notice, please understand.
