The instrument is a high vacuum compact thermal evaporation coater with evaporation temperature from 200℃ to 1700℃. The tungsten wire basket is used as the evaporation source, and the evaporation source is built in at the bottom of high purity alumina crucible.
The instrument is a high vacuum compact thermal evaporation coater with evaporation temperature from 200℃ to 1700℃. The tungsten wire basket is used as the evaporation source, and the evaporation source is built in at the bottom of high purity alumina crucible. The upper cover is equipped with a rotatable sample stage, which can effectively improve the uniformity of film formation. The instrument has a high-precision temperature control system and uses circulating heating method, which can stabilize the evaporation of metals and organic matter. Stainless steel high-vacuum chamber design, with high-precision molecular pump, can achieve high vacuum requirements, the high vacuum can effectively improve the efficiency and quality of the evaporation coating.
This equipment is suitable for evaporation coating of most metals and certain organic material films.
Small high vacuum thermal evaporation coater | ||||
Sample stage | Size | Φ65mm | Distance to evaporation source | 60mm~100mm adjustable |
Rotary speed | 1-20rpm adjustable | |||
Evaporation system | Evaporation source | Tungsten wire basket | Max temperature | 1700℃ |
Thermocouple | S type thermocouple | |||
Vacuum chamber | Chamber size | φ170mm × 200mm | Observation Window | Quartz observation window φ70 |
Chamber material | Stainless steel | Opening way | Top cover open | |
Vacuum system | Model | CY-GZK103-A | Pumping interface | KF40 |
Molecular pump | CY-600 | Exhaust interface | KF16 | |
Backing pump | Rotary vane pump | Vacuum measurement | Compound vacuum gauge | |
Ultimate vacuum | 1.0E-5Pa | |||
Pumping ate | Molecular pump: 600L/S rotary Rotary vane pump: 1.1L/S comprehensive pumping performance: 20 minutes vacuum up to: 1.0E-3pa | |||
Other parameters | Supply voltage | AC220V,50Hz | Dimensions | 600mm×300mm×470mm |
Total power | 1.5kw | Total weight | 40kg |
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