The multi-function coating machine can perform vacuum carbon evaporation, vacuum thermal evaporation and plasma sputtering. It can also perform a variety of ion treatments under the protection of high-purity argon.
The multi-function coating machine can perform vacuum carbon evaporation, vacuum thermal evaporation and plasma sputtering. It can also perform a variety of ion treatments under the protection of high-purity argon. By changing the function kit, the device can quickly switch between multiple functions, which is very suitable for making SEM samples in the laboratory. This instrument is equipped with a mechanical pump and a molecular pump, which can meet a variety of vacuum requirements, especially high vacuum, and can effectively improve the quality of coating.
Product model | CY-PEC250G-HV | ||
Vacuum chamber | Bell jar: φ250x340mm Evaporated glass isolation cover size: φ88x150mm with side opening hole Plasma sputtering coating glass isolation cover size: φ88x150mm | ||
Intake system | Equipped with manual fine-tuning valve, the interface is 1/4 inch ferrule connector | ||
Power requirements | AC 220V 50Hz | ||
Plasma sputtering set | Sputtering voltage | 1600V | |
Maximum current | 50mA | ||
Target size | 2 inches | ||
Working vacuum | 10Pa~20Pa | ||
Working atmosphere | Requires high purity argon | ||
Thermal evaporation coating set | Number of evaporation sources | 2 | |
Max. current | 100A | ||
Working vacuum | 10^-3Pa | ||
Working atmosphere | Do not need any gas. | ||
Sample stage | Diameter φ60mm, rotatable | ||
Carbon evaporation set | Evaporation method | Carbon rod evaporation | |
Max. current | 160A | ||
Working vacuum | 10^-3Pa | ||
Working atmosphere | Do not need any gas. | ||
Vacuum system | Product model | CY-GZK103-A | |
Molecular pump | Turbomolecular pump | ||
Backing pump | Two-stage otary vane pump | ||
Pumping rate | Molecular pump: 600L/S | Comprehensive pumping performance: 30 minutes vacuum can reach: 5×10E-3Pa | |
Rotary vane pump: 1.1L/S | |||
Ultimate vacuum | 5×10E-4Pa | ||
Pumping port | KF40 | ||
Exhaust interface | KF16 | ||
Vacuum measurement | Compound vacuum gauge |
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