5 inch short distance evaporation coating furnace with stainless steel chamber

5 inch short distance evaporation coating furnace with stainless steel chamber

The short range organic evaporative coating furnace is a double heating zone rapid heat treatment furnace with an 11" outer diameter quartz tube，

It is the main tool for studying the new generation of thin films for solar cells, such as CdTe, sulfide and perovskite solar cells.

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The short range organic evaporative coating furnace is a double heating zone rapid heat treatment furnace with an 11" outer diameter quartz tube. It is designed for PVD or CSS(Near sublimation) film coating 3 "diameter or 2" x 2". The short distance evaporation coating furnace uses two sets of halogen heaters (top and bottom) with a maximum heating rate of 20ºC/s. Two 30-segment precision temperature controllers are built in with an accuracy of +/-1ºC. Includes RS485 port and control software to allow furnace operation and temperature curve recording via PC. It is the main tool for studying the new generation of thin films for solar cells, such as CdTe, sulfide and perovskite solar cells.

5 inch short distance evaporation coating furnace Technical parameters:

Product name	5 inch short distance evaporation coating furnace
Product model	CY-EVH350JJL-5"-SS
Structure	1. Two temperature controllers are used to control the top and bottom heating elements respectively. A float flowmeter is installed to allow gas to flow into the vacuum chamber 2. Vacuum chamber: 350 mm Dia x 300 mm h, made of stainless steel Observation window: 100 mm diameter Opening mode: front door type 3. Vacuum flange is made of 316 stainless steel, electric lifting 4. Two 5"x5" IR heating plates with adjustable spacing. 5. The top sample holder can be rotated at a speed of 0-7 RPM
Heating element and sample board	The heating element consists of 20 infrared lamps, which are located at the top and bottom The distance between the two heating tables can be adjusted by a DC motor In order to reduce heat radiation and achieve a faster cooling rate, the heating element is installed in a stainless steel housing with a water-cooled sandwich (stainless steel housing is made of 316 stainless steel). Aluminum nitride ceramic sheet (5"×5"×0.5mm thickness) with high thermal conductivity is used as the loading platform to achieve better heating uniformity A 5"×5" graphite crucible can be placed on the bottom loading table to hold the evaporated material When using this instrument, it is necessary to use a circulating water cooler (KJ-5300 type, 16L/min).
Temperature control system	Two sophisticated temperature control systems independently control the upper and lower heating zones, which can be set up to 30 stages of cooling procedures Every temperature control system comes with ultra-mild break protection
Thermoelectric couple	Two type K thermocouples, mounted on the top and bottom, are in contact with aluminum nitride ceramic sheets
Operating temperature	Maximum temperature per heater: RT-950℃. Maximum temperature difference between two heaters: < = 300ºC depending on the distance between the two heaters: The maximum distance is 30mm. Temperature difference: 315ºC @ Heat the bottom only Sample speed: 1-20RPM
Flowmeter	Two way float flowmeter 16 -160 mL/m 500 - 5000 mL/m
Vacuum pump	Equipped with a molecular pump system, using one-click operation 600L/S, 1x10-5 Torr or more
Voltage	208V 60HZ three-phase