5 inch proximity evaporation coating furnace is an ideal experimental tool for exploring the new generation of thin film solar cells, such as CdTe, sulfide and perovskite solar cells.
The 5-inch proximity evaporation coater furnace is a rapid heat treatment furnace, and its furnace chamber is a 12-inch diameter quartz tube. This device is specially designed for thermal evaporation (or top and bottom) and has a maximum heating rate of 20°C/s. PID method is adopted for temperature adjustment, and 30 temperature rise and fall programs can be set. There is an RS485 interface installed on the instrument panel, which can be equipped with control software to import the heating program and temperature curve into the computer. It is an ideal experimental tool for exploring the new generation of thin film solar cells, such as CdTe, sulfide and perovskite solar cells.
evaporation coater furnace Technical parameter:
Items | Detail |
Supply voltage | AC220V,50/60Hz |
Maximum power | 10KW |
Structure | Two temperature controllers are used to control the top and bottom two sets of heating elements respectively. A float flow meter is installed, and gas can be introduced into the vacuum chamber. |
Basic parameters | Working temperature: up to 800C Recommended heating rate: ≤10C/s (each temperature zone is heated separately) |
Temperature control accuracy | Two sets of infrared lamps are used as heating elements, which are located at the top and bottom respectively. In order to reduce heat radiation and achieve a faster cooling rate, the heating elements are installed in a stainless steel shell with a water-cooled interlayer (the stainless steel shell is made of 316 stainless steel. It adopts thermal conductivity. A high rate aluminum nitride ceramic sheet (5" X5^ Xo. 5nn] thickness) is used as the sample stage to achieve better heating uniformity. The bottom sample stage. A 5° X5* graphite crucible can be placed on it to hold the evaporated raw materials. |
Temperature Control System | Two precise temperature control systems independently control the upper and lower heating zones, and can set 30-stage heating and cooling programs. Each temperature control system is equipped with over-temperature and couple-break protection. PC communication interface, software can be installed, and the temperature control program can be installed. and temperature curve imported into the computer. |
Temperature measuring element | Two K-type thermocouples. , mounted on the top and bottom, are in contact with aluminum nitride ceramic sheets. |
Precautions for use | The air pressure in the furnace tube should not be higher than 0.02MPa Due to the high air pressure inside the gas cylinder, a pressure reducing valve must be installed on the gas cylinder when gas is introduced into the furnace tube. It is recommended to purchase a pressure reducing valve in our company. More precise and safe to use The air pressure in the furnace tube should not be higher than 0.02MPa Due to the high air pressure inside the gas cylinder, a pressure reducing valve must be installed on the gas cylinder when gas is introduced into the furnace tube. It is recommended to purchase a pressure reducing valve in our company. will be more add precision and safety When the temperature of the furnace body is higher than 1000C, the furnace tube cannot be in a vacuum state, and the air pressure in the furnace tube must be equal to the atmospheric pressure and kept at normal pressure. The gas flow into the furnace tube should be less than 200SCCM to avoid the impact of the cold atmospheric flow on the heating quartz tube . Long-term use temperature of quartz tube < 1100C For the sample heating experiment, it is not recommended to close the exhaust valve and the intake valve at the flange end of the furnace tube. If you need to close the air valve to heat the sample, you should always pay attention to the indication of the pressure gauge. If the air pressure indication is greater than 0.02MPa, the vent valve must be opened immediately to prevent accidents (such as furnace tube rupture, flange flying out, etc.) The gas flow into the furnace tube should be less than 200SCCM to avoid the impact of the cold atmospheric flow on the heated quartz tube. The long-term use temperature of the quartz tube is < 1100C 0.02MPa, the vent valve must be opened immediately to prevent accidents (such as furnace tube rupture, flange flying out, etc.) |
Opening method | Electric lift cover |
Flowmeter | Two-way float flowmeter |
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