Liquid or colloidal materials can be coated on silicon wafers, crystals, quartz, ceramics and other substrates to form films. It is mainly used in photoresist spin coating, biological culture medium production, and polymer film production by sol-gel method.
Liquid or colloidal materials can be coated on silicon wafers, crystals, quartz, ceramics and other substrates to form films. It is mainly used in photoresist spin coating, biological culture medium production, and polymer film production by sol-gel method.
Technical parameter of spin coater
Input power supply | AC220V, 50Hz |
Sample dimension | Max. Dia. 8" (~200mm) |
Chamber material | Stainless steel |
Upper cover material | PVC, convenient to observe the spin-coating status |
Rotating speed | 0~8000rpm adjustable |
Accelerated speed | 100~5000rpm/s |
Speed resolution | 1rpm |
Operating mode | Touch screen control |
Syringe pump device | 6-channel independent control syringe pump, and the control program is compatible with spin coater Applicable syringe specification: 1ml - 60ml Max. Stroke: 90mm Linear velocity range: 7.94um/min-79.4mm/min Stroke control accuracy: Error≤±0.5% (stroke ≥30% of the max. stroke) Rated linear thrust: >90N |
Dispensing device | Automatic and programmable dispensing; 6 dispensers, no cross contamination; Accurate control on 2 dispense lines: Repeatable dispense amounts, min. dispense amounts: 50 ul±5ul. These dispense lines carry toluene. Other 4 dispensers can be less accurate and carry octane or acetonitrile; Tubes, syringes......are robust to solvent toluene, octane, acetonitrile |
Vacuum chuck | 4 pieces (diameter 10mm, 25mm, 55mm and 150mm) |
Vacuum pump | Oil-less pump |
Pumping speed | 50 L/min |
Dimension of spin coater | ~290mm*365mm*300mm |
Net weight of spin coater | ~20kg |
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