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8-inch spin coater with 6-channel independent control injection pump8-inch spin coater with 6-channel independent control injection pump8-inch spin coater with 6-channel independent control injection pump8-inch spin coater with 6-channel independent control injection pump8-inch spin coater with 6-channel independent control injection pump

8-inch spin coater with 6-channel independent control injection pump

    Liquid or colloidal materials can be coated on silicon wafers, crystals, quartz, ceramics and other substrates to form films. It is mainly used in photoresist spin coating, biological culture medium production, and polymer film production by sol-gel method.


Liquid or colloidal materials can be coated on silicon wafers, crystals, quartz, ceramics and other substrates to form films. It is mainly used in photoresist spin coating, biological culture medium production, and polymer film production by sol-gel method.

Technical parameter of spin coater

Input power supply

AC220V, 50Hz

Sample dimension

Max. Dia. 8"   (~200mm)

Chamber material

Stainless   steel

Upper cover material

PVC,   convenient to observe the spin-coating status

Rotating speed

0~8000rpm adjustable

Accelerated speed

100~5000rpm/s

Speed resolution

1rpm

Operating mode

Touch screen   control

Syringe pump device

6-channel   independent control syringe pump, and the control program is compatible with   spin coater

Applicable syringe specification: 1ml - 60ml

Max. Stroke: 90mm

Linear velocity range: 7.94um/min-79.4mm/min

Stroke control accuracy: Error≤±0.5% (stroke ≥30% of the max.   stroke)

Rated linear thrust: >90N

Dispensing device

Automatic and   programmable dispensing;

6 dispensers,   no cross contamination;

Accurate control on 2   dispense lines: Repeatable dispense amounts, min. dispense amounts: 50 ul±5ul. These dispense lines carry toluene. Other 4   dispensers can be less accurate and carry octane or acetonitrile; 

Tubes,   syringes......are robust to solvent toluene, octane, acetonitrile

Vacuum chuck

4 pieces   (diameter 10mm, 25mm, 55mm and 150mm)

Vacuum pump

Oil-less pump

Pumping speed

50 L/min

Dimension of spin   coater

~290mm*365mm*300mm

Net weight of spin   coater

~20kg


Contact Us
  • E-mail: cysi@cysi.wang
  • Tel: +86 371 5519 9322
  • Fax: +86 371 8603 6875
  • Add: No. 820, 8th Floor, 1st Unit, 9th Block, Cuizhu Street, High-Tech Zone, Zhengzhou, Henan, China




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