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12 inch Spin Coater with stainless steel Chamber12 inch Spin Coater with stainless steel Chamber12 inch Spin Coater with stainless steel Chamber12 inch Spin Coater with stainless steel Chamber12 inch Spin Coater with stainless steel Chamber

12 inch Spin Coater with stainless steel Chamber

    spin coater is with vacuum chuck designed for easy and quick coating via sol-gel for wafers up to 12" diameter

CY-SPC12-C spin coater is with vacuum chuck designed for easy and quick coating via sol-gel for wafers up to 12" diameter. This spin coater adopts advanced precision motor, the maximum speed can reach 5000rpm, which effectively guarantees the uniformity of film formation. Besides, the instrument adopts touch screen control, can preset the coating curve, which greatly simplifies the process.

Spin coater application:

Liquid or colloidal materials can be coated on silicon wafers, crystals, quartz, ceramics and other substrates to form thin films, mainly used in photoresist spin coating, biological medium production, sol-gel method for polymer film production, etc.

Technical parameters:

Input   power supply

AC220V,   50Hz

Chamber   material

stainless steel   (transparent acrylic)

Substrate   size

Diameter≤12   inches (~300mm)

Spin   speed

0-5000rpm

Acceleration

100-5000rpm/s

Speed   resolution

1rpm

Single   step time

3000s

Operation   method

7   inches HD LCD touch screen

Dispensing   method

Manual   dispensing

Coating   curve

Each   curve has 5 segments, can store 5 curves in total

Vacuum   chuck

Yes,   includes

Vacuum   pump

Oil-less   pump

Pumping   speed

50   L/min

Total   weight

~40kg

12 inch Spin Coater with stainless steel Chamber

Contact Us
  • E-mail: cysi@cysi.wang
  • Tel: +86 371 5519 9322
  • Fax: +86 371 8603 6875
  • Add: No. 820, 8th Floor, 1st Unit, 9th Block, Cuizhu Street, High-Tech Zone, Zhengzhou, Henan, China




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