Home > Products > Magnetron Sputter coating
Three target upper magnetron sputtering coatingThree target upper magnetron sputtering coatingThree target upper magnetron sputtering coatingThree target upper magnetron sputtering coating

Three target upper magnetron sputtering coating

    Three target magnetron sputtering coating instrument is a cost-effective magnetron sputtering coating equipment independently developed by our company, which has the characteristics of standardization, modularization and customization. The equipment can be used to prepare single-layer or multi-layer ferroelectric films, conductive films, alloy films, semiconductor films, ceramic films, dielectric films, optical films, oxide films, hard films, polytetrafluoroethylene films, etc

Three target magnetron sputtering coating instrument is a cost-effective magnetron sputtering coating equipment independently developed by our company, which has the characteristics of standardization, modularization and customization. The equipment can be used to prepare single-layer or multi-layer ferroelectric films, conductive films, alloy films, semiconductor films, ceramic films, dielectric films, optical films, oxide films, hard films, polytetrafluoroethylene films, etc. DC power supply can be used for the preparation of metal films, RF power supply can be used for the preparation of non-metallic films, and the three targets can meet the needs of multi-layer or multiple coating. Compared with similar equipment, the three-target magnetron sputtering coating instrument is not only widely used, but also has the advantages of small volume and easy operation. It is an ideal equipment for preparing material films in the laboratory.

 magnetron sputtering coating technical parameters :

Three target magnetron sputtering coating   machine (DC power supply + RF power supply)

Sample table

Sputtering mode

Sputtering orientation upwards, the sample stage is located above the   sputtering target

Center top setting sample holder, with one shutter

Sample holder

φ150mm

Control accuracy

±1℃

Heating range

Room   temperature500℃

Adjustable speed

1-20rpm   adjustable

Target base distance adjustable

The distance   between the target and the substrate can be adjusted electrically

 

 

Magnetron target gun

Target plane

Circular plane   target

Sputtering   vacuum

10Pa0.2Pa

Target   diameter

5050.8mm

Target   thickness

25mm

Note: if the target is magnetic material (such as Fe, Co, Ni), the   thickness cannot be more than 1.5mm, and strong magnetic sputtering gun is required,   will need extra charge.

Insulation voltage

>2000V

Quantity

2 inches*3with shutters   for each gun

Cable   specification

SL-16

Target head   temperature

65℃

 

Vacuum chamber

Inner wall   treatment

Electrolytic polishing

Chamber size

φ300mm × 350mm

Chamber   material

304 stainless   steel

Observation   window

Quartz window, diameter φ100mm with shutter

Sealing method

Viton seal

Open method

Top opening, cylinder auxiliary support

 

 

 

 

 

 

 

 

 

 

 

Gas control system

Flow control

3-way mass   flow meter:

Oxygen: range   0100SCCM

Argon gas:   range 0200SCCM

Nitrogen: range 0500SCCM

(Note: In order to achieve a higher oxygen-free   environment, the vacuum chamber must be cleaned with high-purity inert gas at   least 3 times.)

Gas type

Argon, nitrogen, oxygen, and other inert gases

Control valve   type

Solenoid valve

Control valve   static state

Normally   closed

Measuring   linearity

±1.5% F.S

Measurement   repeatability

±0.2% F.S

Measuring   response time

≤8 secondsT95

Working   pressure range

0.3MPa

Valve body   pressure

3MPa

Working   temperature

545

Body material

Stainless steel 316L

Valve body   leakage rate

1×10-8Pa.m3/s

Pipe joints

1/4Compression fitting

Input and   output signal

05V

Power supply

±15V±5%)(+15V  50mA,    15V 200mA

Overall   dimensions (mm)

130 (width) ×   102 (height) × 28 (thickness)

Communication   Interface

RS485 MODBUS protocol

DC power supply

Power supply

500W

Output voltage

0600V

Maximum output   current

1A

Timing length

65000 S

Starting time

110 S

Quantity

2 sets

RF power supply

Power supply

500W

Power output   range

0W-500W, with auto match

Maximum   reflected power

100W

RF frequency

13.56MHz+/-0.005%   stability

Power   stability

≤5W

Harmonic   component

less than   -50dbc

Quantity

1 set


Contact Us
  • E-mail: cysi@cysi.wang
  • Tel: +86 371 5519 9322
  • Fax: +86 371 8603 6875
  • Add: No. 820, 8th Floor, 1st Unit, 9th Block, Cuizhu Street, High-Tech Zone, Zhengzhou, Henan, China




Follow Us

Copyright © Zhengzhou CY Scientific Instrument Co., Ltd. All Rights Reserved    Update cookies preferences

| Sitemap |       Technical Support: