Breif Introduction
CY-600-2HD is a compact magnetron sputtering system with dual 2" target sources.The DC source for metallic film coating, and the other RF source for non-metallic material coating . This coating system is designed for coating both single or multiple film layers, such as alloy, ferroelectric, semiconductor, ceramic, dielectric, optical, PTFE, etc
Input Power | 1.220VAC 50/60Hz, single phase |
Source Power | 1.Two sputtering power sources are integrated into one control box |
2. DC source: 500W for coating metallic materials | |
3.RF source: 600W with automatching for coating non-metallic materials ( Center) | |
4.Compact 300 RF source is available at extra cost | |
Magnetron Sputtering Head | 1.Two 2" Magnetron Sputtering Heads with water cooling jackets are included |
2.Target size requirement: 2" diameter | |
3.Thickness Range: 0.1 - 5 mm for both metallic and non-conductive targets | |
4.One stainless steel and one Al2O3 ceramic targets are included for demo testing | |
5.Head Water Cooling: 10ml/min water flow required, and one 16ml/min digitally | |
6.Customized coater: Two DC head without, RF sputtering, RF head without | |
Vacuum Chamber | 1.Vacuum Chamber: 300 mm Dia x 300 mm height, made of stainless steel |
2.Observation Window: 100 mm diameter | |
Sample Holder | 1.Sample holder size: 140mm dia. for. 4" wafer max |
2.Sample holder rotation speed is adjustable: 1 - 20 rpm for uniform coating | |
3.The holder temperature is adjustable from RT to 500°C Max with accuracy +/- 1.0 °C | |
Gas Flow Control | 1.Flow rate: 200 ml/min max. |
2.Flow rate is adjustable on the 6" touch screen control panel | |
Vacuum Pump Station | High speed turbo vacuum pump system is directly installed on the vacuum chamber |
Heavy duty dual stage mechanical pump is connected to turbo pump for faster | |
Mobile pump station is included and the compact sputtering coater can be put on | |
Max. vacuum level: 10^-6 torr with chamber baking | |
Thickness Monitor | One Precision quartz thickness sensor is built into the chamber to monitor coating |
LED Display Unit outside chamber can: | |
Input material to be coated according to data base included | |
Display total thickness coated and coating speed | |
5 pcs quartz sensors (consumable) are included | |
Water cooling is required | |
Overall Dimensions | L6600mm× W660mm× H1200mm |
Application Note | In order to remove oxygen from the chamber, suggest you use 5% Hytrogen + 95 % |
Please use > 5N purity Argon gas for plasma sputtering. Even though 5N purity Ar, usually contain 10- 100 ppm oxygen and H2O | |
Net Weight | 160 kg |
Warranty | One years limited warranty with lifetime support |
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