CY-MSH500-II-DCRF-SS is a special laboratory coating machine with two targets developed by our company. this magnetron sputtering coater machine is equipped with a DC power supply and a RF power supply. It can be used to prepare single or multi-layer ferroelectric thin films, conductive films, alloy films, semiconductor films, ceramic films, dielectric films, optical films, etc.
CY-MSP500S-DCRF-B is a special laboratory coating machine with two targets developed by our company. this magnetron sputtering coater machine is equipped with a DC power supply and a RF power supply. this magnetron sputtering coater machine can be used to prepare single or multi-layer ferroelectric thin films, conductive films, alloy films, semiconductor films, ceramic films, dielectric films, optical films, etc.
a. Compared with the conventional plasma sputtering, magnetron sputtering has the advantages of high energy, high speed, high deposition rate and low sample temperature rise;
b. The magnetron target is equipped with water-cooled interlayer. The water cooler can effectively take away heat and avoid heat accumulation on the target surface, so that the magnetron coating can work stably for a long time;
c. This model adopts the layout of under target, the sample table is on the top, and the height with the target surface can be precisely adjusted by program, and can be rotated and heated, with excellent performance.
Model | CY-MSH500-II-DCRF-SS | |
Input | AC220V,50Hz | |
Total power | 6KW | |
Ultimate vacuum degree | 5x10-4Pa | |
Sample table parameters | Size | 150 Dia. |
Height | 70 mm adjustable | |
Heating | ≤500℃ | |
Rotation speed | 1-20 rpm | |
Magnetron sputtering head parameters | Quantity | 2-set,2-inch |
Cooling mode | Water cooled,required flow rate10L/min | |
Water chiller | 10L/min circulating water cooling | |
Vacuum chamber | Size | 500mm Dia. × 490mm H |
Material | Stainless steel | |
Watch window | 100mm Dia. | |
Open mode | front opening door | |
Gas flow controller | 1channel 200sccm Ar; | |
Vacuum pump | Molecular pump system pumping,600L/S | |
Film thickness gauge | Quartz vibrating film thickness gauge , one set,Resolution 0.10 Å | |
Sputter power supply | DC power supply:one set,500W,for metal films RF power supply:one set,500W,for non-metallic films | |
Operating mode | All-in-one computer operation | |
Overall dimensions | 1090mm x 900mm x 1250mm | |
Total weight | 350kg |
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