CYKY-300-2HD dual target magnetron sputtering coater

Model

CYKY-300-2HD

Installation   conditions

This   equipment is required to be used at the altitude of 1000m or less, the   temperature of 25℃±15℃,   and the humidity of 55% Rh ± 10% Rh.

1.   Water: The equipment is equipped with a self-circulating chiller (filling   pure water or deionized water)

2.   Electricity: AC220V 50Hz, must have a good ground connection.

3.   Gas: The equipment chamber needs to be filled with argon gas (purity of 99.99% or more). Self-provided argon gas cylinder (with Ø6mm double ferrule   joint) and pressure reducing valve

4.   Workbench: size 650mm × 600mm × 700mm, bearing more than 200kg

5. Ventilation device: need

Main features

1.   Configure two target guns, A matching RF power supply is used for sputter   coating of non-conductive targets, and a matching DC power supply is used for   sputter coating of conductive materials.

2.   It can prepare a variety of films, and has a wide range of applications.

3.   It is small in size and easy to operate.

Technical   parameters

1.   the power supply voltage: 220V 50Hz

2.   rated power: 1200W (excluding vacuum pump)

3.   Working vacuum degree: 10-4Pa

4.   working temperature: RT-500℃, accuracy ± 1×(you can increase the temperature according to actual needs)

5.   the number of target guns: 1

6.   target gun cooling method: water cooling

7.   Target size: Ø2’’, thickness 0.1-5mm (different thickness depending on target   material)

8.   DC sputtering power: 500W (optional)

9.   RF sputtering power: 300W / 500W (optional)

10.   loading sample table: Ø140mm

11.   the sample table speed: adjustable within 1rpm-20rpm

12.   Protective gas: inert gases such as Ar and N2

13.   Intake gas path: mass flow meter controls 2 channels of intake air, flow rate   is 200SCCM

specifications

Main   unit size: 500mm × 560mm × 660mm, the whole machine size: 1300mm × 660mm ×   1200mm; weight: 160kg

Standard accessories

1

DC power control system

1

2

RF power control system

1

3

Film   thickness monitor system

1

4

Molecular pump

1

5

Chiller

1

6

Cooling water pipe (Ø6mm)

4

Standard accessories

Various targets such as gold, indium, silver, and platinum