Desktop single target magnetron sputtering coater is a high cost performance magnetron sputtering coater equipment independently developed by our company, which has the characteristics of miniaturization and standardization.
Desktop single target magnetron sputtering coater is a high cost performance magnetron sputtering coater equipment independently developed by our company, which has the characteristics of miniaturization and standardization. The magnetron target can be selected from 1 inch and 2 inches, and customers can choose according to the size of the substrate to be plated; the power supply is 150W DC power supply, which can be used for metal sputtering coating. The coating instrument is equipped with a vent interface, which can be filled with protective gas. If the customer needs to mix gas, you can contact the staff to configure a high-precision mass flow meter to meet the needs of the experiment. The instrument is equipped with advanced turbo molecular pump set, the ultimate vacuum can reach 1.0E-5Pa, and other types of molecular pumps are also available for purchase.
The equipment can be used to prepare single-layer ferroelectric films, conductive films, alloy films, etc. Compared with similar equipment, this single-target magnetron sputtering coating instrument is compact in design, highly integrated, compact, and can be placed on a table for use. It is an ideal equipment for preparing material films in the laboratory.
product name | Desktop single target magnetron coater with reciprocating sample table | ||
Product number | CY-MSZ180-50F-DC-Q | ||
Reciprocating sample table | size | 50*100mm | |
Reciprocating speed | 0~50mm/s | ||
Magnetron target gun | Target plane | Circular flat target | |
Sputtering vacuum | 10Pa~0.2Pa | ||
Target diameter | 2 inches | ||
Target thickness | Recommended 2 ~ 5mm | ||
Target temperature | ≦65℃ | ||
Vacuum chamber | Cavity size | About Φ180mm × H 215mm | |
Cavity material | High purity quartz | ||
Observation window | Omnidirectional transparency | ||
Opening method | Removable top cover | ||
power supply | DC power supply | 150W max | |
Quantity | 1 | ||
Molecular pump system | Foreline pump
| Rotary vane pump | VRD-4 |
Pumping speed | 1.1L/S | ||
Ultimate vacuum | 5*10-1Pa | ||
Molecular pump | Molecular pumping speed | 600L/S | |
Rated speed | 24000rpm | ||
Ultimate vacuum | 5*10-5Pa | ||
Vibration value | ≦0.1um | ||
Start Time | ≦4.5min | ||
Downtime | <7min | ||
cooling method | Water cooling + air cooling | ||
Water cooler | Cooling water temperature | ≦37℃ | |
Cooling water flow rate | 10L/min | ||
Supply voltage | AC220V 50Hz |
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