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Desktop single target magnetron sputtering coater with reciprocating sample tableDesktop single target magnetron sputtering coater with reciprocating sample tableDesktop single target magnetron sputtering coater with reciprocating sample table

Desktop single target magnetron sputtering coater with reciprocating sample table

    Desktop single target magnetron sputtering coater is a high cost performance magnetron sputtering coater equipment independently developed by our company, which has the characteristics of miniaturization and standardization. 

Desktop single target magnetron sputtering coater is a high cost performance magnetron sputtering coater equipment independently developed by our company, which has the characteristics of miniaturization and standardization. The magnetron target can be selected from 1 inch and 2 inches, and customers can choose according to the size of the substrate to be plated; the power supply is 150W DC power supply, which can be used for metal sputtering coating. The coating instrument is equipped with a vent interface, which can be filled with protective gas. If the customer needs to mix gas, you can contact the staff to configure a high-precision mass flow meter to meet the needs of the experiment. The instrument is equipped with advanced turbo molecular pump set, the ultimate vacuum can reach 1.0E-5Pa, and other types of molecular pumps are also available for purchase.

Desktop single target magnetron sputtering coater application range:

The equipment can be used to prepare single-layer ferroelectric films, conductive films, alloy films, etc. Compared with similar equipment, this single-target magnetron sputtering coating instrument is compact in design, highly integrated, compact, and can be placed on a table for use. It is an ideal equipment for preparing material films in the laboratory.

Technical parameters of single target magnetron sputtering coater:

product   name

Desktop   single target magnetron coater with reciprocating sample table

Product   number

CY-MSZ180-50F-DC-Q

Reciprocating   sample table

size

50*100mm

Reciprocating   speed

0~50mm/s

Magnetron   target gun

Target   plane

Circular   flat target

Sputtering   vacuum

10Pa0.2Pa

Target   diameter

2   inches

Target   thickness

Recommended   2 5mm

Target   temperature

65

Vacuum   chamber

Cavity   size

About   Φ180mm × H 215mm

Cavity   material

High   purity quartz

Observation   window

Omnidirectional   transparency

Opening   method

Removable   top cover

power   supply

DC   power supply

150W   max

Quantity

1

Molecular   pump system

Foreline   pump

 

 

Rotary   vane pump

VRD-4  

Pumping   speed

1.1L/S

Ultimate   vacuum

5*10-1Pa

Molecular   pump

Molecular   pumping speed

600L/S

Rated   speed

24000rpm

Ultimate   vacuum

5*10-5Pa

Vibration   value

0.1um

Start   Time

4.5min

Downtime

<7min

cooling   method

Water   cooling + air cooling

Water   cooler

Cooling   water temperature

37

Cooling   water flow rate

10L/min

Supply   voltage

AC220V   50Hz

Disclaimer: The product introduction content (including product images, product descriptions, technical parameters, etc.) of this site is for reference only. As the update may not be timely, there will be some differences between the content and the actual situation. Please contact our sales staff to confirm. The information provided on this site does not constitute any offer or promise, and the company will periodically improve and modify the website information, without prior notice, please understand.

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  • E-mail: cysi@cysi.wang
  • Tel: +86 371 5519 9322
  • Fax: +86 371 8603 6875
  • Add: No. 820, 8th Floor, 1st Unit, 9th Block, Cuizhu Street, High-Tech Zone, Zhengzhou, Henan, China




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