This equipment is a single-target magnetron coating apparatus, which can be used for the preparation of metal thin films. this Desktop single target magnetron sputtering coater can be used in the fields of electronics, optics, and special ceramic preparation. It can also be used for laboratory SEM sample preparation.
This model can be equipped with a film thickness meter, which can monitor film thickness data in real time and provide reliable parameters for the experimental process.
Features:
Using a quartz vacuum chamber, the coating process is omnidirectionally visible, which is convenient for observation and recording of experiments.
The chamber design is convenient and easy to clean, which is very suitable for laboratory use.
At the same time, the equipment is equipped with a rotating heating sample stage, which can effectively improve the uniformity of the film and the quality of the film.
The whole machine adopts modular design, simple operation logic and intuitive operation interface, which is easy to get started.
Desktop single target magnetron sputtering coater technical parameters:
product name | Desktop double head magnetron sputtering coating machine |
Product number | CY-MSZ180-I-DC-Q |
sample stage | Dimensions | φ100mm |
Heating temperature | ≦500℃ |
Adjustable speed | ≦20rpm |
Magnetic target gun | Equipped with a two-inch magnetic control target, target size: diameter 50.8mm, thickness ≦3mm |
vacuum chamber | Cavity size | φ180mm X215mm |
observation window | omnidirectionally transparent |
Cavity material | High purity quartz |
Opening method | Removable top cover |
Vacuum system | Backing pump | Low noise bipolar rotary vane pump |
Molecular pump | Low noise and high pumping speed turbomolecular pump |
Vacuum measurement | Composite vacuum gauge, range: 10-5~105Pa |
Air extraction interface | KF16 |
Air extraction interface | KF40 |
Exhaust interface | KF16 |
System vacuum | 1.0×10-4Pa |
Power supply | AC 220V 50/60Hz |
Pumping rate | The pumping speed of the molecular pump is 600L/s, and the pumping speed of the backing pump is 1.1L/s. |
Power configuration | Number of power supplies | A set of DC power supply |
Output Power | 300W |
Other parameters | Supply voltage | AC220V,50Hz |
Total power | 2kW |
Overall size | 550mm X 350mm X400mm |
Note:
This equipment does not contain a vacuum pump. Users should use it with a molecular pump set. We recommend our CY-GZK103A pump set.
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