CY-MSZ180-I-DC-Q is very suitable for aluminum plating and other materials that are very sensitive to air. This magnetron sputtering coater equipment has compact structure and perfect function and is easy to use, and is very suitable for various coating tests.
This magnetron sputtering coater equipment is a desktop single sputter head magnetron sputtering coating machine. The miniaturized design of the equipment limits the appearance of the equipment to the desktop level, greatly reducing the installation site requirements. The equipment is equipped with a high-performance DC power supply with target refining function, which can effectively remove the oxide layer on the surface of the aluminum target. this magnetron sputtering coater is very suitable for aluminum plating and other materials that are very sensitive to air. This equipment has compact structure and perfect function and is easy to use, and is very suitable for various coating tests.
Sample stage | Size | φ100mm |
Rotating speed | 0-20rpm adjustable | |
Heating | Max. 500℃ | |
Magnetron sputtering head | Quantity | 2" x1 |
Vacuum chamber | Chamber size | φ180mm x 215mm |
Observation window | Omnidirectional transparent | |
Chamber material | High purity quartz | |
Open method | Upper cover removable | |
Vacuum system | Mechanical pump | Rotary vane pump |
Pumping port | KF16 | |
Exhaust interface | KF16 | |
Molecular pump | Turbomolecular pump | |
Pumping port | KF40 | |
Exhaust interface | KF40 | |
Vacuum measurement | Resistance gauge + ionization gauge | |
Ultimate vacuum | 1.0E-4Pa | |
Power supply | AC 220V 50/60Hz | |
Pumping rate | Mechanical pump 1.1L/s Molecular pump 600L/s | |
Power configuration | Quantity | DC power supply x1 |
Max. output power | DC power supply 500W | |
Supply voltage | AC220V, 50Hz | |
Others | Total power | 2kW |
Overall size | 550mm x 350mm x 500mm |
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