This equipment is a desktop single-target magnetron sputtering coater. The equipment has been miniaturized and designed to limit the appearance of the equipment to the desktop level, greatly reducing the installation site requirements.
This equipment is a desktop single-target magnetron sputtering coater. The magnetron sputtering coater has been miniaturized and designed to limit the appearance of the equipment to the desktop level, greatly reducing the installation site requirements. The equipment is equipped with a DC power supply, which can be used for sputtering metal materials and has the characteristics of fast speed and low temperature rise. The whole vacuum chamber adopts the design of bottom target, which has good sputtering effect and less impurity pollution, which can protect the sample to the utmost extent.
product name | Desktop bottom-single-target sputtering coater with stainless steel cavity | |
Product number | CY-MSZ180X-I-DC-SS | |
sample stage | Dimensions | φ100mm |
Heating temperature | ≦500℃ | |
Adjustable speed | ≦20rpm | |
Magnetic target gun | Equipped with a two-inch magnetic control target, target size: diameter 50.8mm, thickness ≦3mm | |
vacuum chamber | Cavity size | φ180mm X215mm |
observation window | omnidirectionally transparent | |
Cavity material | 304 stainless steel | |
Opening method | Removable top cover | |
Vacuum system | Backing pump | Low noise bipolar rotary vane pump |
Molecular pump | Low noise and high pumping speed turbomolecular pump | |
Vacuum measurement | Composite vacuum gauge, range: 10-5~105Pa | |
Air extraction interface | KF16 | |
Air extraction interface | KF40 | |
Exhaust interface | KF16 | |
System vacuum | 1.0×10-4Pa | |
Power supply | AC 220V 50/60Hz | |
Pumping rate | The pumping speed of the molecular pump is 600L/s, and the pumping speed of the backing pump is 1.1L/s. | |
Power configuration | Number of power supplies | A set of DC power supply |
Output Power | 300W | |
Other parameters | Supply voltage | AC220V,50Hz |
Total power | 2kW | |
Overall size | 550mm X 350mm X400mm |
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