Ultra-High vacuum thermal evaporation coater is designed for coating oxygen sensitive metallic materials, such as Ti, Al, and Ir etc. It also can be used for coating all kinds of materials. It has four evaporation heater sources and coat two type of materials at the same time at high vacuum up to 10-6 torr.
Ultra-High vacuum thermal evaporation coater is equipped with 4 evaporation heating boats, each of which can be independently evaporation coating.There is a rotatable baffle above the heating boat. When one of the heating boats is working,the baffle will cover the other three tungsten boats to prevent contamination of the vapor deposition materials.If the partial configuration is changed, the evaporation coating of the organic material can be realized, which can meet the research requirements of the light-emitting device and the organic solar battery, and it is an experimental device with an ideal coating effect and high cost performance.
Input & Output Power |
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Vacuum Chamber |
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Vacuum Pump |
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Evaporation Source |
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Control Unit |
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Overall Dimensions | L600mm×W860mm× H1500mm |
Net Weight | 600 kg |
Facility Requirement for Installation |
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