Magnetron sputtering coating equipment is a special laboratory coating instrument developed by our company. The equipment can be equipped with DC power supply and RF power supply. The power ranges from 500W to 1000W. It can be used to prepare single or multilayer ferroelectric thin films, conductive films, alloy films, semiconductor films, ceramic films, dielectric films, optical films, etc.
Compared with the conventional plasma sputtering, magnetron sputtering has the advantages of high energy, high speed, high deposition rate and low sample temperature rise. The magnetron target is equipped with water-cooled interlayer. The water cooler can effectively take away heat and avoid heat accumulation on the target surface, so that the magnetron coating can work stably for a long time.
After compact design, the balance of volume and performance is realized, the appearance is beautiful and the function is comprehensive. The whole machine is controlled by touch screen and built-in one button coating program, which is easy to operate and is an ideal equipment for preparing thin films in laboratory.
Single-target RF magnetron sputtering coater technical parameters:
Power supply | AC220V，50Hz |
Whole power | 6KW |
Ultimate vacuum | 5x10-4Pa |
Sample table parameters | Size | φ150mm |
Heat temp | 500℃ max. |
Temp control | ±1℃ |
Rotation speed | 1-20rpm adjustable |
Magnetron sputtering head parameters | Quantity | 2-inch x2 |
Cooling mode | Water cooled, flow 10L/min required |
Water chiller | 10L/min Circulating water cooling |
Vacuum chamber | Size | φ300mm x 340mm H |
Material | SUS |
Watch window | φ100mm |
Opening mode | open type, easy to replace target |
Gas flow controller | One-channel,200sccm Ar; |
Vacuum pump | A molecular pump system, pumping 600L/S |
Quartz vibrating film thickness gauge | One set, resolution 0.10 angstrom |
Sputter power source | RF power supply: 500W, Suitable for preparing non - metallic films |
Operating mode | All-in-one computer operation |
Overall Dimensions | 1090mm x 900mm x 1250mm |
Total weight | 350kg |
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