Home > Products > Magnetron Sputter coating
Organic and inorganic evaporation coater

Organic and inorganic evaporation coater

    Organic and inorganic evaporation coater is used in the growth of thin-film solar cell, research of ELOEL molecular organic electroluminescent devices thin films. It can be widely used in small amount production and on the scientific research on film materials by universities and research institutes.

Organic and inorganic evaporation coater adopts linear structure and is mainly composed of two organic material growth chambers which are connected by gate valves. One of the two growth Chambers is reserved for the butt joint interface with the glove box, which can complete the transfer of substrates between two independent film preparation systems. The organic material growth chamber mainly consists of vacuum chamber assembly, organic evaporation source, thermal resistance evaporation boat, sample transfer device, sample platform, film thickness monitor, vacuum chamber lighting device, baking device and so on.

Organic and inorganic evaporation coater specifications:

Vacuum chamber

Two D-shaped vacuum chamber, size: aboutΦ450×H750; Two   vacuum chamber of the vacuum system configuration, extreme pressure, vacuum   recovery time, thermal resistance evaporation boat and power supply, the film   thickness monitor, vacuum chamber lighting equipment, baking equipment,   sample platform configuration , The above configuration is the same as the   technical parameters

Vacuum system configuration

Japanese cryopump, oil-free vortex dry pump and electromagnetic valve, compound digital-displayed vacuum measurement auge and meter, valves etc.

Ultimate pressure

≤2.0×10-5 Pa

vacuum recovery time

Reach 1×10-4 Pa in 40 mins

Electric magnetic coupling sample transfer device

Vacuum chamber 1

It adopts magnetic coupling line motion   delivering device and is driven by stepper motor, It is equipped with remote   manual control box to control straight forward and backward

Organic evaporation source and power

Vacuum chamber 1

9 new model OEL sublimation evaporation   source, each filled with 10CC evaporation material, room temperature-800℃: 7;   room temperature-1000℃: 2; evaporation source power: 4

Vacuum chamber 2

6 new model OEL sublimation evaporation   source, each filled with 10CC evaporation material, room temperature-800℃: 6; room temperature-1000℃: 2; evaporation source power: 4

Heat resistance evaporation boat and power

New model evaporation boat: 2 (heat   resistance evaporation boat); digital heat resistance evaporation power: 1,   with fine adjustment function (0.1A); aluminum coated special purpose box   evaporation boat: 2; metal evaporation boat: 10; evaporation source baffle:   2.

Film thickness monitor

Thickness resolution ratio

Non-uniformity: 0.0133Å/measure; 50 samples   average: 0.002Å/measure

Velocity resolution ratio

Non-uniformity: 0.0133angstrom per second;   50 samples average: 0.02 angstrom per second

Precision

0.03HZ/measure, 2ppm

Speed

Measuring 10 times per second

Vacuum chamber lighting device

LED lighting outside chamber, to prevent film coating contaminate lighting

Baking device

A method of baking in a vacuum outdoor   baking strip

Sample stage

Sample size

Load one 100×100mm or 50×50mm substrate

Mode of motion

Power driven lifting, rotatable, rotating speed 0-30rpm, rotating speed adjustable


Disclaimer: The product introduction content (including product images, product descriptions, technical parameters, etc.) of this site is for reference only. As the update may not be timely, there will be some differences between the content and the actual situation. Please contact our sales staff to confirm. The information provided on this site does not constitute any offer or promise, and the company will improve and modify any information on the website from time to time without prior notice.

Contact Us
  • E-mail: cysi@cysi.wang
  • Tel: +86 371 5519 9322
  • Fax: +86 371 8603 6875
  • Add: No. 820, 8th Floor, 1st Unit, 9th Block, Cuizhu Street, High-Tech Zone, Zhengzhou, Henan, China




Follow Us

Copyright © Zhengzhou CY Scientific Instrument Co., Ltd. All Rights Reserved    Update cookies preferences

| Sitemap |       Technical Support: