5-inch close-range rotary evaporation coating furnace

Vacuum Flanges

• Top Flange with one KFD-25 vacuum port and one gas outlet(1/4" pipe required) can slide up or down manually to load and unload substrate and evaporated material easily.

• Bottom flange has one KFD-25 vacuum port with one gas        inlet (1/4" pipe required) with needle valves.

• The flange is sealed by double silicone o-rings and can achieve max. the vacuum pressure of 10E-2 Torr by a quality mechanical pump and 10E-5 Torr by a molecular pump (vacuum pump is not included, please order separately).

• One digital vacuum gauge is installed on the top flange.  

• Precision anti-corrosion digital vacuum gauge is in standard        package.

Gas Flow Control

Gas mixer integrated with two float-meters with adjustable measurement ranges of 16 -160 mL/m 

Heater and Sample Holder

• Two independently controlled heaters with a manually adjustable gap from 2-30 mm. 

• 20 pcs Halogen lamps are used as the heating element for rapid thermal processing.

• Heaters are is made of stainless steel with water cold jacket to reduce heat radiation and allow for fast cooling.

• 5" Dia. the circular wafer holder is built into the top heater        for holding the substrate.

• One set of high thermal-conductive AlN plates or graphite plate (5" Dia.×0.5mm Thick) is included (place on the bottom for evaporating material )

• A 58L/min circulating water chiller is included for saving water        source

Temperature Controller
 
 

• Two precision digital temperature controllers with 30 segments programmable offer independent control of the top and bottom heaters.

• Each controller has PID autotune function to protect heaters from overshooting and an alarm function to avoid overheating and a thermal couple are broken.

• PC communication interface & software is installed for recording temperature profile.

Working Temperature

• Maximum temperature for each heater: <= 800℃.

• Maximum temperature difference between two heaters: <= 300℃ depends on the spacing between two heaters:

• Spacing 30mm Max. temp difference: 315℃ heating bottom only

Heating & Cooling Rate

• Heating: < 8℃/s ( heating single heater only )

• Cooling: < 10℃/s (600 - 100℃) Max.

Thermal Couple

Two K-type thermal couples are installed on top and bottom   heaters separately.

Working Voltage

220VAC, Single Phase, 60A Air Breaker required

Power Requirement

9.5KW total

Dimensions

1085mm L×680mm W×1710mm H

Warranty

One year limited with lifetime support (Consumable parts such as quartz tube and heating lamps are not covered by the warranty).